JPS629726Y2 - - Google Patents

Info

Publication number
JPS629726Y2
JPS629726Y2 JP1982141944U JP14194482U JPS629726Y2 JP S629726 Y2 JPS629726 Y2 JP S629726Y2 JP 1982141944 U JP1982141944 U JP 1982141944U JP 14194482 U JP14194482 U JP 14194482U JP S629726 Y2 JPS629726 Y2 JP S629726Y2
Authority
JP
Japan
Prior art keywords
sintered
layer
coarse
wafer
adsorbent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982141944U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5948050U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14194482U priority Critical patent/JPS5948050U/ja
Publication of JPS5948050U publication Critical patent/JPS5948050U/ja
Application granted granted Critical
Publication of JPS629726Y2 publication Critical patent/JPS629726Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP14194482U 1982-09-21 1982-09-21 保持装置 Granted JPS5948050U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14194482U JPS5948050U (ja) 1982-09-21 1982-09-21 保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14194482U JPS5948050U (ja) 1982-09-21 1982-09-21 保持装置

Publications (2)

Publication Number Publication Date
JPS5948050U JPS5948050U (ja) 1984-03-30
JPS629726Y2 true JPS629726Y2 (enExample) 1987-03-06

Family

ID=30317312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14194482U Granted JPS5948050U (ja) 1982-09-21 1982-09-21 保持装置

Country Status (1)

Country Link
JP (1) JPS5948050U (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2651354B2 (ja) * 1994-08-01 1997-09-10 シーケーディ株式会社 真空チャックの吸着板

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55143036A (en) * 1979-04-19 1980-11-08 Toshiba Corp Holder for semiconductor wafer

Also Published As

Publication number Publication date
JPS5948050U (ja) 1984-03-30

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