JPS5948050U - 保持装置 - Google Patents

保持装置

Info

Publication number
JPS5948050U
JPS5948050U JP14194482U JP14194482U JPS5948050U JP S5948050 U JPS5948050 U JP S5948050U JP 14194482 U JP14194482 U JP 14194482U JP 14194482 U JP14194482 U JP 14194482U JP S5948050 U JPS5948050 U JP S5948050U
Authority
JP
Japan
Prior art keywords
sintered
workpiece
holding device
adsorbent
grains
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14194482U
Other languages
English (en)
Japanese (ja)
Other versions
JPS629726Y2 (enExample
Inventor
茂 藤本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP14194482U priority Critical patent/JPS5948050U/ja
Publication of JPS5948050U publication Critical patent/JPS5948050U/ja
Application granted granted Critical
Publication of JPS629726Y2 publication Critical patent/JPS629726Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP14194482U 1982-09-21 1982-09-21 保持装置 Granted JPS5948050U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14194482U JPS5948050U (ja) 1982-09-21 1982-09-21 保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14194482U JPS5948050U (ja) 1982-09-21 1982-09-21 保持装置

Publications (2)

Publication Number Publication Date
JPS5948050U true JPS5948050U (ja) 1984-03-30
JPS629726Y2 JPS629726Y2 (enExample) 1987-03-06

Family

ID=30317312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14194482U Granted JPS5948050U (ja) 1982-09-21 1982-09-21 保持装置

Country Status (1)

Country Link
JP (1) JPS5948050U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0847835A (ja) * 1994-08-01 1996-02-20 Ckd Corp 真空チャックの吸着板

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55143036A (en) * 1979-04-19 1980-11-08 Toshiba Corp Holder for semiconductor wafer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55143036A (en) * 1979-04-19 1980-11-08 Toshiba Corp Holder for semiconductor wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0847835A (ja) * 1994-08-01 1996-02-20 Ckd Corp 真空チャックの吸着板

Also Published As

Publication number Publication date
JPS629726Y2 (enExample) 1987-03-06

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