JPS6286741A - パタ−ンの位置合わせずれ量評価方法 - Google Patents

パタ−ンの位置合わせずれ量評価方法

Info

Publication number
JPS6286741A
JPS6286741A JP60227202A JP22720285A JPS6286741A JP S6286741 A JPS6286741 A JP S6286741A JP 60227202 A JP60227202 A JP 60227202A JP 22720285 A JP22720285 A JP 22720285A JP S6286741 A JPS6286741 A JP S6286741A
Authority
JP
Japan
Prior art keywords
thin film
electrodes
film electrode
line
electrode array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60227202A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0311097B2 (cg-RX-API-DMAC7.html
Inventor
Akira Kawai
河合　晃
Shigeo Uotani
魚谷　重雄
Junji Miyazaki
宮崎　順二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP60227202A priority Critical patent/JPS6286741A/ja
Publication of JPS6286741A publication Critical patent/JPS6286741A/ja
Publication of JPH0311097B2 publication Critical patent/JPH0311097B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP60227202A 1985-10-11 1985-10-11 パタ−ンの位置合わせずれ量評価方法 Granted JPS6286741A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60227202A JPS6286741A (ja) 1985-10-11 1985-10-11 パタ−ンの位置合わせずれ量評価方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60227202A JPS6286741A (ja) 1985-10-11 1985-10-11 パタ−ンの位置合わせずれ量評価方法

Publications (2)

Publication Number Publication Date
JPS6286741A true JPS6286741A (ja) 1987-04-21
JPH0311097B2 JPH0311097B2 (cg-RX-API-DMAC7.html) 1991-02-15

Family

ID=16857095

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60227202A Granted JPS6286741A (ja) 1985-10-11 1985-10-11 パタ−ンの位置合わせずれ量評価方法

Country Status (1)

Country Link
JP (1) JPS6286741A (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8102053B2 (en) 2007-04-16 2012-01-24 Renesas Electronics Corporation Displacement detection pattern for detecting displacement between wiring and via plug, displacement detection method, and semiconductor device
US8519389B2 (en) 2010-07-15 2013-08-27 Renesas Electronics Corporation Semiconductor device, method of manufacturing the same, and method of designing the same

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI328457B (en) 2003-03-18 2010-08-11 Suntory Holdings Ltd Angiotensin-converting enzyme inhibitory peptides

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8102053B2 (en) 2007-04-16 2012-01-24 Renesas Electronics Corporation Displacement detection pattern for detecting displacement between wiring and via plug, displacement detection method, and semiconductor device
US8519389B2 (en) 2010-07-15 2013-08-27 Renesas Electronics Corporation Semiconductor device, method of manufacturing the same, and method of designing the same

Also Published As

Publication number Publication date
JPH0311097B2 (cg-RX-API-DMAC7.html) 1991-02-15

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