JPS6278192A - ｎ型単結晶薄膜の製造方法 - Google Patents

ｎ型単結晶薄膜の製造方法

Info

Publication number
JPS6278192A
JPS6278192A JP21517185A JP21517185A JPS6278192A JP S6278192 A JPS6278192 A JP S6278192A JP 21517185 A JP21517185 A JP 21517185A JP 21517185 A JP21517185 A JP 21517185A JP S6278192 A JPS6278192 A JP S6278192A
Authority
JP
Japan
Prior art keywords
thin film
single crystal
type single
crystal thin
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21517185A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0547519B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Makoto Konagai
誠 小長井
Yorihisa Kitagawa
北川　順久
Nobuhiro Fukuda
福田　信弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP21517185A priority Critical patent/JPS6278192A/ja
Publication of JPS6278192A publication Critical patent/JPS6278192A/ja
Publication of JPH0547519B2 publication Critical patent/JPH0547519B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122—Incoherent waves
    • B01J19/123—Ultraviolet light

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP21517185A 1985-09-30 1985-09-30 ｎ型単結晶薄膜の製造方法 Granted JPS6278192A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21517185A JPS6278192A (ja) 1985-09-30 1985-09-30 ｎ型単結晶薄膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21517185A JPS6278192A (ja) 1985-09-30 1985-09-30 ｎ型単結晶薄膜の製造方法

Publications (2)

Publication Number Publication Date
JPS6278192A true JPS6278192A (ja) 1987-04-10
JPH0547519B2 JPH0547519B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-16

Family

ID=16667834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21517185A Granted JPS6278192A (ja) 1985-09-30 1985-09-30 ｎ型単結晶薄膜の製造方法

Country Status (1)

Country Link
JP (1) JPS6278192A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02188497A (ja) * 1989-01-12 1990-07-24 Nec Corp シリコン分子線成長方法
EP0494699A3 (en) * 1987-11-27 1995-03-29 Ethyl Corp High purity doping alloys

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0494699A3 (en) * 1987-11-27 1995-03-29 Ethyl Corp High purity doping alloys
JPH02188497A (ja) * 1989-01-12 1990-07-24 Nec Corp シリコン分子線成長方法

Also Published As

Publication number Publication date
JPH0547519B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-16

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees