JPS627710B2 - - Google Patents
Info
- Publication number
- JPS627710B2 JPS627710B2 JP53050282A JP5028278A JPS627710B2 JP S627710 B2 JPS627710 B2 JP S627710B2 JP 53050282 A JP53050282 A JP 53050282A JP 5028278 A JP5028278 A JP 5028278A JP S627710 B2 JPS627710 B2 JP S627710B2
- Authority
- JP
- Japan
- Prior art keywords
- region
- openings
- forming
- conductivity type
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 20
- 239000012535 impurity Substances 0.000 claims description 19
- 239000004065 semiconductor Substances 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 9
- 230000005669 field effect Effects 0.000 claims description 7
- 238000009792 diffusion process Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5028278A JPS54142074A (en) | 1978-04-27 | 1978-04-27 | Method of fabricating gate protecting semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5028278A JPS54142074A (en) | 1978-04-27 | 1978-04-27 | Method of fabricating gate protecting semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54142074A JPS54142074A (en) | 1979-11-05 |
| JPS627710B2 true JPS627710B2 (ko) | 1987-02-18 |
Family
ID=12854565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5028278A Granted JPS54142074A (en) | 1978-04-27 | 1978-04-27 | Method of fabricating gate protecting semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54142074A (ko) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5543864A (en) * | 1978-09-25 | 1980-03-27 | Hitachi Ltd | Mis semiconductor device |
| JPS5793044U (ko) * | 1980-11-27 | 1982-06-08 | ||
| JPH0714044B2 (ja) * | 1984-11-22 | 1995-02-15 | 株式会社日立製作所 | 電荷結合装置の入力回路 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4975288A (ko) * | 1972-11-22 | 1974-07-19 |
-
1978
- 1978-04-27 JP JP5028278A patent/JPS54142074A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4975288A (ko) * | 1972-11-22 | 1974-07-19 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54142074A (en) | 1979-11-05 |
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