JPS626688Y2 - - Google Patents
Info
- Publication number
- JPS626688Y2 JPS626688Y2 JP7779781U JP7779781U JPS626688Y2 JP S626688 Y2 JPS626688 Y2 JP S626688Y2 JP 7779781 U JP7779781 U JP 7779781U JP 7779781 U JP7779781 U JP 7779781U JP S626688 Y2 JPS626688 Y2 JP S626688Y2
- Authority
- JP
- Japan
- Prior art keywords
- chuck body
- chuck
- main
- semiconductor wafer
- movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 29
- 239000004065 semiconductor Substances 0.000 claims description 25
- 239000011248 coating agent Substances 0.000 claims description 15
- 238000000576 coating method Methods 0.000 claims description 15
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 230000001154 acute effect Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 26
- 238000001035 drying Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7779781U JPS626688Y2 (US07655688-20100202-C00086.png) | 1981-05-28 | 1981-05-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7779781U JPS626688Y2 (US07655688-20100202-C00086.png) | 1981-05-28 | 1981-05-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57191051U JPS57191051U (US07655688-20100202-C00086.png) | 1982-12-03 |
| JPS626688Y2 true JPS626688Y2 (US07655688-20100202-C00086.png) | 1987-02-16 |
Family
ID=29873441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7779781U Expired JPS626688Y2 (US07655688-20100202-C00086.png) | 1981-05-28 | 1981-05-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS626688Y2 (US07655688-20100202-C00086.png) |
-
1981
- 1981-05-28 JP JP7779781U patent/JPS626688Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57191051U (US07655688-20100202-C00086.png) | 1982-12-03 |
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