JPS6265778A - フォトレジスト塗布方法 - Google Patents
フォトレジスト塗布方法Info
- Publication number
- JPS6265778A JPS6265778A JP20328785A JP20328785A JPS6265778A JP S6265778 A JPS6265778 A JP S6265778A JP 20328785 A JP20328785 A JP 20328785A JP 20328785 A JP20328785 A JP 20328785A JP S6265778 A JPS6265778 A JP S6265778A
- Authority
- JP
- Japan
- Prior art keywords
- liquid agent
- liquid
- roll
- substrate
- photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 56
- 239000003795 chemical substances by application Substances 0.000 title claims abstract description 24
- 238000000576 coating method Methods 0.000 title claims abstract description 24
- 238000000034 method Methods 0.000 title claims description 8
- 239000011248 coating agent Substances 0.000 title abstract description 18
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 25
- 239000000758 substrate Substances 0.000 claims abstract description 24
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 claims abstract description 18
- 238000001035 drying Methods 0.000 claims abstract description 13
- 239000011521 glass Substances 0.000 claims abstract description 4
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 2
- 230000007423 decrease Effects 0.000 abstract description 3
- 238000001704 evaporation Methods 0.000 abstract description 2
- 230000008020 evaporation Effects 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 18
- 230000000694 effects Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000005507 spraying Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- HNJBEVLQSNELDL-UHFFFAOYSA-N pyrrolidin-2-one Chemical compound O=C1CCCN1 HNJBEVLQSNELDL-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- QHGNHLZPVBIIPX-UHFFFAOYSA-N tin(II) oxide Inorganic materials [Sn]=O QHGNHLZPVBIIPX-UHFFFAOYSA-N 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20328785A JPS6265778A (ja) | 1985-09-17 | 1985-09-17 | フォトレジスト塗布方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20328785A JPS6265778A (ja) | 1985-09-17 | 1985-09-17 | フォトレジスト塗布方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6265778A true JPS6265778A (ja) | 1987-03-25 |
| JPH0344824B2 JPH0344824B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-07-09 |
Family
ID=16471546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20328785A Granted JPS6265778A (ja) | 1985-09-17 | 1985-09-17 | フォトレジスト塗布方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6265778A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5028457A (en) * | 1987-11-30 | 1991-07-02 | Dainippon Screen Mfg. Co., Ltd. | Roll coating apparatus and method capable of providing coatings without pin holes |
| US10141691B2 (en) | 2015-05-29 | 2018-11-27 | Sumitomo Wiring Systems, Ltd. | Connector |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5659878A (en) * | 1979-10-01 | 1981-05-23 | Gen Aniline & Film Corp | Abrasionnresistant radiationnhardenable coating |
-
1985
- 1985-09-17 JP JP20328785A patent/JPS6265778A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5659878A (en) * | 1979-10-01 | 1981-05-23 | Gen Aniline & Film Corp | Abrasionnresistant radiationnhardenable coating |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5028457A (en) * | 1987-11-30 | 1991-07-02 | Dainippon Screen Mfg. Co., Ltd. | Roll coating apparatus and method capable of providing coatings without pin holes |
| US10141691B2 (en) | 2015-05-29 | 2018-11-27 | Sumitomo Wiring Systems, Ltd. | Connector |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0344824B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-07-09 |
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