JPS626236A - 露光装置 - Google Patents
露光装置Info
- Publication number
- JPS626236A JPS626236A JP14534785A JP14534785A JPS626236A JP S626236 A JPS626236 A JP S626236A JP 14534785 A JP14534785 A JP 14534785A JP 14534785 A JP14534785 A JP 14534785A JP S626236 A JPS626236 A JP S626236A
- Authority
- JP
- Japan
- Prior art keywords
- fluorescent lamp
- light
- tube wall
- wall temperature
- amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims abstract description 13
- 230000007423 decrease Effects 0.000 claims abstract description 11
- 238000010586 diagram Methods 0.000 description 9
- 230000003247 decreasing effect Effects 0.000 description 7
- 230000005856 abnormality Effects 0.000 description 5
- 230000002159 abnormal effect Effects 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Exposure Or Original Feeding In Electrophotography (AREA)
- Projection-Type Copiers In General (AREA)
- Light Sources And Details Of Projection-Printing Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14534785A JPS626236A (ja) | 1985-07-02 | 1985-07-02 | 露光装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14534785A JPS626236A (ja) | 1985-07-02 | 1985-07-02 | 露光装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS626236A true JPS626236A (ja) | 1987-01-13 |
JPH0525104B2 JPH0525104B2 (enrdf_load_stackoverflow) | 1993-04-09 |
Family
ID=15383081
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14534785A Granted JPS626236A (ja) | 1985-07-02 | 1985-07-02 | 露光装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS626236A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0413572U (enrdf_load_stackoverflow) * | 1990-05-18 | 1992-02-04 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60250363A (ja) * | 1984-05-25 | 1985-12-11 | Casio Comput Co Ltd | 画像形成装置 |
-
1985
- 1985-07-02 JP JP14534785A patent/JPS626236A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60250363A (ja) * | 1984-05-25 | 1985-12-11 | Casio Comput Co Ltd | 画像形成装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0413572U (enrdf_load_stackoverflow) * | 1990-05-18 | 1992-02-04 |
Also Published As
Publication number | Publication date |
---|---|
JPH0525104B2 (enrdf_load_stackoverflow) | 1993-04-09 |
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