JPS6259253B2 - - Google Patents
Info
- Publication number
- JPS6259253B2 JPS6259253B2 JP214678A JP214678A JPS6259253B2 JP S6259253 B2 JPS6259253 B2 JP S6259253B2 JP 214678 A JP214678 A JP 214678A JP 214678 A JP214678 A JP 214678A JP S6259253 B2 JPS6259253 B2 JP S6259253B2
- Authority
- JP
- Japan
- Prior art keywords
- diffraction
- ray
- sample
- collimator
- monochrome
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 15
- 238000005259 measurement Methods 0.000 claims description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- 238000002441 X-ray diffraction Methods 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- 102100027340 Slit homolog 2 protein Human genes 0.000 description 2
- 101710133576 Slit homolog 2 protein Proteins 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 229910016523 CuKa Inorganic materials 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP214678A JPS5495286A (en) | 1978-01-11 | 1978-01-11 | Xxray diffractor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP214678A JPS5495286A (en) | 1978-01-11 | 1978-01-11 | Xxray diffractor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5495286A JPS5495286A (en) | 1979-07-27 |
| JPS6259253B2 true JPS6259253B2 (enrdf_load_stackoverflow) | 1987-12-10 |
Family
ID=11521201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP214678A Granted JPS5495286A (en) | 1978-01-11 | 1978-01-11 | Xxray diffractor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5495286A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2620106B2 (ja) * | 1988-04-22 | 1997-06-11 | 理学電機 株式会社 | 薄膜試料のｘ線回折極点図形観測装置 |
| JP5546152B2 (ja) * | 2009-04-14 | 2014-07-09 | キヤノン株式会社 | 記録材表面検出装置及びそれを備える画像形成装置 |
-
1978
- 1978-01-11 JP JP214678A patent/JPS5495286A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5495286A (en) | 1979-07-27 |
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