JPS6259050B2 - - Google Patents
Info
- Publication number
- JPS6259050B2 JPS6259050B2 JP57129821A JP12982182A JPS6259050B2 JP S6259050 B2 JPS6259050 B2 JP S6259050B2 JP 57129821 A JP57129821 A JP 57129821A JP 12982182 A JP12982182 A JP 12982182A JP S6259050 B2 JPS6259050 B2 JP S6259050B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon nitride
- crystalline silicon
- nitrogen
- amorphous silicon
- added
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12982182A JPS5921507A (ja) | 1982-07-26 | 1982-07-26 | 結晶質窒化珪素の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12982182A JPS5921507A (ja) | 1982-07-26 | 1982-07-26 | 結晶質窒化珪素の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5921507A JPS5921507A (ja) | 1984-02-03 |
JPS6259050B2 true JPS6259050B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-12-09 |
Family
ID=15019050
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12982182A Granted JPS5921507A (ja) | 1982-07-26 | 1982-07-26 | 結晶質窒化珪素の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5921507A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60155509A (ja) * | 1983-08-12 | 1985-08-15 | Agency Of Ind Science & Technol | 高純度等軸形状窒化けい素微粉の製造方法 |
JPS61191506A (ja) * | 1985-02-18 | 1986-08-26 | Toyo Soda Mfg Co Ltd | 高α型窒化珪素粉末の製造法 |
JPS62148309A (ja) * | 1985-12-23 | 1987-07-02 | Toyo Soda Mfg Co Ltd | 高α型窒化珪素粉末の製造法 |
JP2678872B2 (ja) * | 1993-07-30 | 1997-11-19 | カシオ計算機株式会社 | 波形表示方法 |
JP5682779B2 (ja) * | 2011-02-04 | 2015-03-11 | 三菱マテリアル株式会社 | 高密度かつ接合性に優れたパワーモジュール用基板 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4145224A (en) * | 1974-11-22 | 1979-03-20 | Gte Sylvania Incorporated | Method for enhancing the crystallization rate of high purity amorphous Si3 N4 powder, powders produced thereby and products therefrom |
JPS53102300A (en) * | 1977-02-18 | 1978-09-06 | Toshiba Corp | Preparation of type silicon nitride powders |
JPS5423917A (en) * | 1977-07-25 | 1979-02-22 | Hitachi Metals Ltd | Small raotating machine |
JPS54124898A (en) * | 1978-03-22 | 1979-09-28 | Toyo Soda Mfg Co Ltd | Preparation of silicon nitride |
JPS55113603A (en) * | 1979-02-19 | 1980-09-02 | Toshiba Corp | Manufacture of alpha silicon nitride powder |
JPS5644006A (en) * | 1979-09-19 | 1981-04-23 | Toyobo Co Ltd | Hollow yarn type reverse osmosis apparatus |
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1982
- 1982-07-26 JP JP12982182A patent/JPS5921507A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5921507A (ja) | 1984-02-03 |