JPS6255896A - 透明導電膜のパタ−ン形成方法 - Google Patents
透明導電膜のパタ−ン形成方法Info
- Publication number
- JPS6255896A JPS6255896A JP60195104A JP19510485A JPS6255896A JP S6255896 A JPS6255896 A JP S6255896A JP 60195104 A JP60195104 A JP 60195104A JP 19510485 A JP19510485 A JP 19510485A JP S6255896 A JPS6255896 A JP S6255896A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- transparent conductive
- conductive film
- etching
- photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007261 regionalization Effects 0.000 title description 2
- 238000005530 etching Methods 0.000 claims description 28
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 17
- 229920002120 photoresistant polymer Polymers 0.000 claims description 13
- 229910003437 indium oxide Inorganic materials 0.000 claims description 6
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 6
- BMYNFMYTOJXKLE-UHFFFAOYSA-N 3-azaniumyl-2-hydroxypropanoate Chemical compound NCC(O)C(O)=O BMYNFMYTOJXKLE-UHFFFAOYSA-N 0.000 claims description 5
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical compound I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 claims description 5
- 229940071870 hydroiodic acid Drugs 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 239000010408 film Substances 0.000 description 29
- 239000000203 mixture Substances 0.000 description 5
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 4
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electroluminescent Light Sources (AREA)
- Manufacturing Of Electric Cables (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60195104A JPS6255896A (ja) | 1985-09-04 | 1985-09-04 | 透明導電膜のパタ−ン形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60195104A JPS6255896A (ja) | 1985-09-04 | 1985-09-04 | 透明導電膜のパタ−ン形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6255896A true JPS6255896A (ja) | 1987-03-11 |
| JPH0580798B2 JPH0580798B2 (enrdf_load_stackoverflow) | 1993-11-10 |
Family
ID=16335583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60195104A Granted JPS6255896A (ja) | 1985-09-04 | 1985-09-04 | 透明導電膜のパタ−ン形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6255896A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03197335A (ja) * | 1989-12-25 | 1991-08-28 | Asahi Denka Kogyo Kk | エッチング方法 |
| JPH08136429A (ja) * | 1994-11-11 | 1996-05-31 | Nec Corp | 衝撃破壊試験方法および装置 |
-
1985
- 1985-09-04 JP JP60195104A patent/JPS6255896A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03197335A (ja) * | 1989-12-25 | 1991-08-28 | Asahi Denka Kogyo Kk | エッチング方法 |
| JPH08136429A (ja) * | 1994-11-11 | 1996-05-31 | Nec Corp | 衝撃破壊試験方法および装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0580798B2 (enrdf_load_stackoverflow) | 1993-11-10 |
Similar Documents
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |