JPS6255896A - 透明導電膜のパタ−ン形成方法 - Google Patents

透明導電膜のパタ−ン形成方法

Info

Publication number
JPS6255896A
JPS6255896A JP60195104A JP19510485A JPS6255896A JP S6255896 A JPS6255896 A JP S6255896A JP 60195104 A JP60195104 A JP 60195104A JP 19510485 A JP19510485 A JP 19510485A JP S6255896 A JPS6255896 A JP S6255896A
Authority
JP
Japan
Prior art keywords
pattern
transparent conductive
conductive film
etching
photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60195104A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0580798B2 (enrdf_load_stackoverflow
Inventor
吉田　真弓
洋介 藤田
阿部　惇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60195104A priority Critical patent/JPS6255896A/ja
Publication of JPS6255896A publication Critical patent/JPS6255896A/ja
Publication of JPH0580798B2 publication Critical patent/JPH0580798B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Electric Cables (AREA)
  • Electroluminescent Light Sources (AREA)
JP60195104A 1985-09-04 1985-09-04 透明導電膜のパタ−ン形成方法 Granted JPS6255896A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60195104A JPS6255896A (ja) 1985-09-04 1985-09-04 透明導電膜のパタ−ン形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60195104A JPS6255896A (ja) 1985-09-04 1985-09-04 透明導電膜のパタ−ン形成方法

Publications (2)

Publication Number Publication Date
JPS6255896A true JPS6255896A (ja) 1987-03-11
JPH0580798B2 JPH0580798B2 (enrdf_load_stackoverflow) 1993-11-10

Family

ID=16335583

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60195104A Granted JPS6255896A (ja) 1985-09-04 1985-09-04 透明導電膜のパタ−ン形成方法

Country Status (1)

Country Link
JP (1) JPS6255896A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03197335A (ja) * 1989-12-25 1991-08-28 Asahi Denka Kogyo Kk エッチング方法
JPH08136429A (ja) * 1994-11-11 1996-05-31 Nec Corp 衝撃破壊試験方法および装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03197335A (ja) * 1989-12-25 1991-08-28 Asahi Denka Kogyo Kk エッチング方法
JPH08136429A (ja) * 1994-11-11 1996-05-31 Nec Corp 衝撃破壊試験方法および装置

Also Published As

Publication number Publication date
JPH0580798B2 (enrdf_load_stackoverflow) 1993-11-10

Similar Documents

Publication Publication Date Title
JPS6255896A (ja) 透明導電膜のパタ−ン形成方法
JP2000011863A (ja) Ｃｒ／Ｃｕ／Ｃｒ配線構造体の製造方法並びにそれを用いたプラズマディスプレイパネルの製造方法並びにそれを用いた画像表示装置
JPS63213293A (ja) 透明導電膜のパタ−ン形成方法
JPH04217370A (ja) 薄膜トランジスタのゲ−ト電極およびその製造方法
JPS61280660A (ja) 半導体装置の製造方法
CN107221497B (zh) 导线的制造方法和显示面板
JP2934731B2 (ja) 非線形抵抗素子とその製造方法
JP2000047237A (ja) 導電膜パターンの形成方法及び液晶表示装置の製造方法
JPH0621052A (ja) 導電膜の製造方法
JPS614233A (ja) 透明導電膜のエツチング方法
JPS6243012A (ja) 透明導電膜のエツチング方法
JPH01151237A (ja) 透明導電性膜のエツチング方法
JPS61243613A (ja) 透明導電層の形成方法
JPS62280789A (ja) アクテイブマトリツクス型表示装置用表示電極アレイの製造方法
JPH09185074A (ja) 液晶素子及びその製造方法
JPS60169824A (ja) 光制御素子とその製造方法
JPS587680A (ja) 表示装置
JPH02253236A (ja) 非線形抵抗素子の製造方法
JPS61240608A (ja) 薄膜抵抗パタ−ンの生成方法
JPH02924A (ja) 非線形抵抗素子の製造方法
JPS60181776A (ja) デイスプレイパネルの製造方法
JPH0370330B2 (enrdf_load_stackoverflow)
JPH04149914A (ja) 透明電極の形成方法
KR20050048776A (ko) 전극 패턴 형성방법
JPS58115708A (ja) 表示用電極の形成方法

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees