JPS6252952B2 - - Google Patents
Info
- Publication number
- JPS6252952B2 JPS6252952B2 JP50168879A JP50168879A JPS6252952B2 JP S6252952 B2 JPS6252952 B2 JP S6252952B2 JP 50168879 A JP50168879 A JP 50168879A JP 50168879 A JP50168879 A JP 50168879A JP S6252952 B2 JPS6252952 B2 JP S6252952B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- capacitor
- unit
- ratio
- capacitance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003990 capacitor Substances 0.000 description 59
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 7
- 235000012239 silicon dioxide Nutrition 0.000 description 7
- 239000000377 silicon dioxide Substances 0.000 description 7
- 239000004020 conductor Substances 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000003071 parasitic effect Effects 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000007373 indentation Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
Landscapes
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/US1979/000704 WO1980000763A1 (en) | 1978-09-29 | 1979-09-07 | High-ratio-accuracy capacitor geometries for integrated circuits |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55500734A JPS55500734A (US20100223739A1-20100909-C00025.png) | 1980-10-02 |
| JPS6252952B2 true JPS6252952B2 (US20100223739A1-20100909-C00025.png) | 1987-11-07 |
Family
ID=22147697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50168879A Expired JPS6252952B2 (US20100223739A1-20100909-C00025.png) | 1979-09-07 | 1979-09-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6252952B2 (US20100223739A1-20100909-C00025.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0213753U (US20100223739A1-20100909-C00025.png) * | 1988-07-11 | 1990-01-29 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57199249A (en) * | 1981-06-01 | 1982-12-07 | Matsushita Electronics Corp | Semiconductor device |
| JP3118928B2 (ja) * | 1992-01-24 | 2000-12-18 | 日本電気株式会社 | 容量素子の構造 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5432086A (en) * | 1977-08-16 | 1979-03-09 | Nec Corp | Semiconductor capacity element |
-
1979
- 1979-09-07 JP JP50168879A patent/JPS6252952B2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5432086A (en) * | 1977-08-16 | 1979-03-09 | Nec Corp | Semiconductor capacity element |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0213753U (US20100223739A1-20100909-C00025.png) * | 1988-07-11 | 1990-01-29 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55500734A (US20100223739A1-20100909-C00025.png) | 1980-10-02 |
