JPS6250976B2 - - Google Patents

Info

Publication number
JPS6250976B2
JPS6250976B2 JP54158006A JP15800679A JPS6250976B2 JP S6250976 B2 JPS6250976 B2 JP S6250976B2 JP 54158006 A JP54158006 A JP 54158006A JP 15800679 A JP15800679 A JP 15800679A JP S6250976 B2 JPS6250976 B2 JP S6250976B2
Authority
JP
Japan
Prior art keywords
cover
lead frame
heat block
gas supply
supply pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54158006A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5681945A (en
Inventor
Yoshio Oohashi
Tadashi Ookubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15800679A priority Critical patent/JPS5681945A/ja
Publication of JPS5681945A publication Critical patent/JPS5681945A/ja
Publication of JPS6250976B2 publication Critical patent/JPS6250976B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W99/00—
    • H10W90/756—

Landscapes

  • Wire Bonding (AREA)
  • Die Bonding (AREA)
JP15800679A 1979-12-07 1979-12-07 Assembling device Granted JPS5681945A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15800679A JPS5681945A (en) 1979-12-07 1979-12-07 Assembling device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15800679A JPS5681945A (en) 1979-12-07 1979-12-07 Assembling device

Publications (2)

Publication Number Publication Date
JPS5681945A JPS5681945A (en) 1981-07-04
JPS6250976B2 true JPS6250976B2 (enExample) 1987-10-28

Family

ID=15662188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15800679A Granted JPS5681945A (en) 1979-12-07 1979-12-07 Assembling device

Country Status (1)

Country Link
JP (1) JPS5681945A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007214394A (ja) * 2006-02-10 2007-08-23 Nidec Tosok Corp ワーククランプ装置

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5925232A (ja) * 1982-07-31 1984-02-09 Shinkawa Ltd ワイヤボンディング装置
JPS5958830A (ja) * 1982-09-28 1984-04-04 Shinkawa Ltd ボンダ−用ワ−ク加熱装置
JPS60125734U (ja) * 1984-01-31 1985-08-24 関西日本電気株式会社 ポンデイング装置
JPS61212029A (ja) * 1985-03-18 1986-09-20 San Yakin Kogyo Kk 半導体装置のボンデイング
JPH0237733A (ja) * 1988-07-27 1990-02-07 Toshiba Corp ワイヤボンディング装置
JP4369522B1 (ja) * 2008-10-16 2009-11-25 株式会社新川 基板搬送装置及び基板搬送方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5051261A (enExample) * 1973-09-07 1975-05-08

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007214394A (ja) * 2006-02-10 2007-08-23 Nidec Tosok Corp ワーククランプ装置

Also Published As

Publication number Publication date
JPS5681945A (en) 1981-07-04

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