JPS6246075B2 - - Google Patents

Info

Publication number
JPS6246075B2
JPS6246075B2 JP56211729A JP21172981A JPS6246075B2 JP S6246075 B2 JPS6246075 B2 JP S6246075B2 JP 56211729 A JP56211729 A JP 56211729A JP 21172981 A JP21172981 A JP 21172981A JP S6246075 B2 JPS6246075 B2 JP S6246075B2
Authority
JP
Japan
Prior art keywords
film
forming
silicon dioxide
sputtering
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56211729A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58112375A (ja
Inventor
Masahide Myagi
Kazumi Maruyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Fuji Electric Corporate Research and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd, Fuji Electric Corporate Research and Development Ltd filed Critical Fuji Electric Co Ltd
Priority to JP56211729A priority Critical patent/JPS58112375A/ja
Publication of JPS58112375A publication Critical patent/JPS58112375A/ja
Publication of JPS6246075B2 publication Critical patent/JPS6246075B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/10—Semiconductor bodies
    • H10F77/16—Material structures, e.g. crystalline structures, film structures or crystal plane orientations
    • H10F77/169—Thin semiconductor films on metallic or insulating substrates
    • H10F77/1692—Thin semiconductor films on metallic or insulating substrates the films including only Group IV materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
JP56211729A 1981-12-25 1981-12-25 光起電力装置の製造方法 Granted JPS58112375A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56211729A JPS58112375A (ja) 1981-12-25 1981-12-25 光起電力装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56211729A JPS58112375A (ja) 1981-12-25 1981-12-25 光起電力装置の製造方法

Publications (2)

Publication Number Publication Date
JPS58112375A JPS58112375A (ja) 1983-07-04
JPS6246075B2 true JPS6246075B2 (enrdf_load_stackoverflow) 1987-09-30

Family

ID=16610628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56211729A Granted JPS58112375A (ja) 1981-12-25 1981-12-25 光起電力装置の製造方法

Country Status (1)

Country Link
JP (1) JPS58112375A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60147174A (ja) * 1984-01-12 1985-08-03 Canon Inc フォトセンサ
JPS60147175A (ja) * 1984-01-12 1985-08-03 Canon Inc フォトセンサ

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5189515A (enrdf_load_stackoverflow) * 1975-02-04 1976-08-05
JPS5189513A (ja) * 1975-02-04 1976-08-05 Netsusenhanshagarasu
JPS51150510A (en) * 1975-06-20 1976-12-24 Asahi Glass Co Ltd Novel glass plate which reflects heat rays
JPS5346697A (en) * 1976-10-12 1978-04-26 Seiko Epson Corp Transparent conductive film
JPS6048740B2 (ja) * 1976-11-30 1985-10-29 セイコーエプソン株式会社 表示電極用コ−テイング剤
JPS5461696A (en) * 1977-10-26 1979-05-18 Teijin Ltd Transparent conductive laminated body
JPS5499449A (en) * 1978-01-23 1979-08-06 Hitachi Ltd Roduction of liquid crystal display element
CA1134214A (en) * 1978-03-08 1982-10-26 Roy G. Gordon Deposition method
JPS54143646A (en) * 1978-04-28 1979-11-09 Nec Corp Photosensitive plate for electrophotography
JPS5821827B2 (ja) * 1979-02-09 1983-05-04 三洋電機株式会社 光起電力装置
JPS5846074B2 (ja) * 1979-03-12 1983-10-14 三洋電機株式会社 光起電力装置の製造方法
JP60041878B2 (en) * 1979-02-14 1985-09-19 Sharp Kk Thin film solar cell
JPS5636626A (en) * 1979-09-03 1981-04-09 Canon Inc Display cell
JPS5665973A (en) * 1979-11-02 1981-06-04 Komatsu Ltd Vapor depositing method
JPS6246074A (ja) * 1984-11-05 1987-02-27 Nagano Keiki Seisakusho:Kk エア−パイロツトバルブの操作機構

Also Published As

Publication number Publication date
JPS58112375A (ja) 1983-07-04

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