JPS6241792B2 - - Google Patents

Info

Publication number
JPS6241792B2
JPS6241792B2 JP57215234A JP21523482A JPS6241792B2 JP S6241792 B2 JPS6241792 B2 JP S6241792B2 JP 57215234 A JP57215234 A JP 57215234A JP 21523482 A JP21523482 A JP 21523482A JP S6241792 B2 JPS6241792 B2 JP S6241792B2
Authority
JP
Japan
Prior art keywords
substrate
processed
nozzle
processing apparatus
spray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57215234A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59105865A (ja
Inventor
Shinya Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP21523482A priority Critical patent/JPS59105865A/ja
Publication of JPS59105865A publication Critical patent/JPS59105865A/ja
Publication of JPS6241792B2 publication Critical patent/JPS6241792B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Spray Control Apparatus (AREA)
  • Coating Apparatus (AREA)
JP21523482A 1982-12-07 1982-12-07 スプレ−処理装置 Granted JPS59105865A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21523482A JPS59105865A (ja) 1982-12-07 1982-12-07 スプレ−処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21523482A JPS59105865A (ja) 1982-12-07 1982-12-07 スプレ−処理装置

Publications (2)

Publication Number Publication Date
JPS59105865A JPS59105865A (ja) 1984-06-19
JPS6241792B2 true JPS6241792B2 (enrdf_load_stackoverflow) 1987-09-04

Family

ID=16668930

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21523482A Granted JPS59105865A (ja) 1982-12-07 1982-12-07 スプレ−処理装置

Country Status (1)

Country Link
JP (1) JPS59105865A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102289120B1 (ko) * 2021-04-20 2021-08-12 주식회사 세미안 전자현미경용 이온 스퍼터 및 이온 스퍼터용 시료 회전장치

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5637478Y2 (enrdf_load_stackoverflow) * 1978-09-11 1981-09-02

Also Published As

Publication number Publication date
JPS59105865A (ja) 1984-06-19

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