JPS5637478Y2 - - Google Patents

Info

Publication number
JPS5637478Y2
JPS5637478Y2 JP12495978U JP12495978U JPS5637478Y2 JP S5637478 Y2 JPS5637478 Y2 JP S5637478Y2 JP 12495978 U JP12495978 U JP 12495978U JP 12495978 U JP12495978 U JP 12495978U JP S5637478 Y2 JPS5637478 Y2 JP S5637478Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12495978U
Other languages
Japanese (ja)
Other versions
JPS5540756U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12495978U priority Critical patent/JPS5637478Y2/ja
Publication of JPS5540756U publication Critical patent/JPS5540756U/ja
Application granted granted Critical
Publication of JPS5637478Y2 publication Critical patent/JPS5637478Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Mattresses And Other Support Structures For Chairs And Beds (AREA)
  • Carpets (AREA)
JP12495978U 1978-09-11 1978-09-11 Expired JPS5637478Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12495978U JPS5637478Y2 (enrdf_load_stackoverflow) 1978-09-11 1978-09-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12495978U JPS5637478Y2 (enrdf_load_stackoverflow) 1978-09-11 1978-09-11

Publications (2)

Publication Number Publication Date
JPS5540756U JPS5540756U (enrdf_load_stackoverflow) 1980-03-15
JPS5637478Y2 true JPS5637478Y2 (enrdf_load_stackoverflow) 1981-09-02

Family

ID=29085432

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12495978U Expired JPS5637478Y2 (enrdf_load_stackoverflow) 1978-09-11 1978-09-11

Country Status (1)

Country Link
JP (1) JPS5637478Y2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57178328A (en) * 1981-04-27 1982-11-02 Hitachi Ltd Wafer dryer
JPS59105865A (ja) * 1982-12-07 1984-06-19 Fujitsu Ltd スプレ−処理装置
JPS60110114A (ja) * 1983-11-21 1985-06-15 Kokusai Electric Co Ltd 半導体基板の赤外線熱処理装置
US4574093A (en) * 1983-12-30 1986-03-04 At&T Bell Laboratories Deposition technique

Also Published As

Publication number Publication date
JPS5540756U (enrdf_load_stackoverflow) 1980-03-15

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