JPS6241762B2 - - Google Patents
Info
- Publication number
- JPS6241762B2 JPS6241762B2 JP13143286A JP13143286A JPS6241762B2 JP S6241762 B2 JPS6241762 B2 JP S6241762B2 JP 13143286 A JP13143286 A JP 13143286A JP 13143286 A JP13143286 A JP 13143286A JP S6241762 B2 JPS6241762 B2 JP S6241762B2
- Authority
- JP
- Japan
- Prior art keywords
- water
- cleaning agent
- vapor phase
- phase drying
- washing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001035 drying Methods 0.000 claims description 59
- 239000012808 vapor phase Substances 0.000 claims description 59
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 55
- 238000005406 washing Methods 0.000 claims description 53
- 239000012459 cleaning agent Substances 0.000 claims description 40
- 238000000926 separation method Methods 0.000 claims description 23
- 238000001816 cooling Methods 0.000 claims description 22
- 239000012071 phase Substances 0.000 claims description 12
- 239000008237 rinsing water Substances 0.000 claims description 3
- VOPWNXZWBYDODV-UHFFFAOYSA-N Chlorodifluoromethane Chemical compound FC(F)Cl VOPWNXZWBYDODV-UHFFFAOYSA-N 0.000 description 17
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 14
- 239000003599 detergent Substances 0.000 description 14
- 238000000034 method Methods 0.000 description 8
- 239000007788 liquid Substances 0.000 description 6
- 238000011010 flushing procedure Methods 0.000 description 5
- 238000005192 partition Methods 0.000 description 5
- 239000008346 aqueous phase Substances 0.000 description 4
- PXBRQCKWGAHEHS-UHFFFAOYSA-N dichlorodifluoromethane Chemical compound FC(F)(Cl)Cl PXBRQCKWGAHEHS-UHFFFAOYSA-N 0.000 description 4
- 235000019404 dichlorodifluoromethane Nutrition 0.000 description 4
- 238000009835 boiling Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- AJDIZQLSFPQPEY-UHFFFAOYSA-N 1,1,2-Trichlorotrifluoroethane Chemical compound FC(F)(Cl)C(F)(Cl)Cl AJDIZQLSFPQPEY-UHFFFAOYSA-N 0.000 description 2
- 239000004338 Dichlorodifluoromethane Substances 0.000 description 2
- 230000001476 alcoholic effect Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- UJPMYEOUBPIPHQ-UHFFFAOYSA-N 1,1,1-trifluoroethane Chemical compound CC(F)(F)F UJPMYEOUBPIPHQ-UHFFFAOYSA-N 0.000 description 1
- XWCDCDSDNJVCLO-UHFFFAOYSA-N Chlorofluoromethane Chemical compound FCCl XWCDCDSDNJVCLO-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 230000009469 supplementation Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Extraction Or Liquid Replacement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13143286A JPS6287203A (ja) | 1986-06-06 | 1986-06-06 | 気相乾燥用洗浄剤の水洗分離装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13143286A JPS6287203A (ja) | 1986-06-06 | 1986-06-06 | 気相乾燥用洗浄剤の水洗分離装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16600280A Division JPS5791705A (en) | 1980-11-26 | 1980-11-26 | Method and apparatus for water-washing and separating vapor phase dry cleaning agent |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6287203A JPS6287203A (ja) | 1987-04-21 |
| JPS6241762B2 true JPS6241762B2 (enrdf_load_stackoverflow) | 1987-09-04 |
Family
ID=15057821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13143286A Granted JPS6287203A (ja) | 1986-06-06 | 1986-06-06 | 気相乾燥用洗浄剤の水洗分離装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6287203A (enrdf_load_stackoverflow) |
-
1986
- 1986-06-06 JP JP13143286A patent/JPS6287203A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6287203A (ja) | 1987-04-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4063906B2 (ja) | 洗浄方法 | |
| US4090307A (en) | Method for removing water from workpieces and apparatus therefor | |
| JPS6241762B2 (enrdf_load_stackoverflow) | ||
| JPS6152722B2 (enrdf_load_stackoverflow) | ||
| KR20020048911A (ko) | 화학 필름의 세정 및 건조 방법과 그 장치 | |
| JPS58200540A (ja) | 半導体ウエハの洗浄方法 | |
| JPS62286583A (ja) | アルミデイスク洗浄装置 | |
| JPS634638B2 (enrdf_load_stackoverflow) | ||
| JPS6256846B2 (enrdf_load_stackoverflow) | ||
| JP3266936B2 (ja) | 水除去用組成物及び物品の水除去方法 | |
| JP2644948B2 (ja) | 被洗浄物の水分分離方法 | |
| JPS61220777A (ja) | 洗浄装置 | |
| JP3009006B2 (ja) | 半導体基板の乾燥装置 | |
| JPS6316943A (ja) | アルミ加工品の洗浄方法 | |
| KR100405156B1 (ko) | 고압 세정장치 | |
| JP2001033168A (ja) | 表面処理方法、並びにそれに用いる装置 | |
| JPH08215649A (ja) | 洗浄方法 | |
| JP3431730B2 (ja) | 洗浄方法 | |
| JPS6130060Y2 (enrdf_load_stackoverflow) | ||
| JPH0210832A (ja) | 半導体基板の洗浄方法 | |
| JPH04290586A (ja) | 被洗浄物の濯ぎ洗浄方法およびその装置 | |
| JPH01236904A (ja) | 水切り洗浄剤及び水切り洗浄方法 | |
| JPS6227003A (ja) | 水切り洗浄方法及び装置 | |
| JP2808576B2 (ja) | 有機溶剤を用いる洗浄方法 | |
| JPH091092A (ja) | 冷温洗浄方法 |