JPS6238869B2 - - Google Patents
Info
- Publication number
- JPS6238869B2 JPS6238869B2 JP53014232A JP1423278A JPS6238869B2 JP S6238869 B2 JPS6238869 B2 JP S6238869B2 JP 53014232 A JP53014232 A JP 53014232A JP 1423278 A JP1423278 A JP 1423278A JP S6238869 B2 JPS6238869 B2 JP S6238869B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon oxide
- oxide layer
- forming
- phosphorus
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1423278A JPS54107270A (en) | 1978-02-10 | 1978-02-10 | Semiconductor device and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1423278A JPS54107270A (en) | 1978-02-10 | 1978-02-10 | Semiconductor device and its production |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54107270A JPS54107270A (en) | 1979-08-22 |
| JPS6238869B2 true JPS6238869B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-08-20 |
Family
ID=11855317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1423278A Granted JPS54107270A (en) | 1978-02-10 | 1978-02-10 | Semiconductor device and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54107270A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63149877U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1987-03-20 | 1988-10-03 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6284584B1 (en) | 1993-12-17 | 2001-09-04 | Stmicroelectronics, Inc. | Method of masking for periphery salicidation of active regions |
| US6107194A (en) * | 1993-12-17 | 2000-08-22 | Stmicroelectronics, Inc. | Method of fabricating an integrated circuit |
| US5439846A (en) * | 1993-12-17 | 1995-08-08 | Sgs-Thomson Microelectronics, Inc. | Self-aligned method for forming contact with zero offset to gate |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5528434B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1974-01-29 | 1980-07-28 |
-
1978
- 1978-02-10 JP JP1423278A patent/JPS54107270A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63149877U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1987-03-20 | 1988-10-03 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54107270A (en) | 1979-08-22 |