JPS6238853B2 - - Google Patents

Info

Publication number
JPS6238853B2
JPS6238853B2 JP53002798A JP279878A JPS6238853B2 JP S6238853 B2 JPS6238853 B2 JP S6238853B2 JP 53002798 A JP53002798 A JP 53002798A JP 279878 A JP279878 A JP 279878A JP S6238853 B2 JPS6238853 B2 JP S6238853B2
Authority
JP
Japan
Prior art keywords
reticle
positioning
output voltage
pattern
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53002798A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5496374A (en
Inventor
Shinji Kunyoshi
Toshishige Kurosaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP279878A priority Critical patent/JPS5496374A/ja
Publication of JPS5496374A publication Critical patent/JPS5496374A/ja
Publication of JPS6238853B2 publication Critical patent/JPS6238853B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
  • Projection-Type Copiers In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP279878A 1978-01-17 1978-01-17 Automatic positioning device Granted JPS5496374A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP279878A JPS5496374A (en) 1978-01-17 1978-01-17 Automatic positioning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP279878A JPS5496374A (en) 1978-01-17 1978-01-17 Automatic positioning device

Publications (2)

Publication Number Publication Date
JPS5496374A JPS5496374A (en) 1979-07-30
JPS6238853B2 true JPS6238853B2 (enrdf_load_html_response) 1987-08-20

Family

ID=11539385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP279878A Granted JPS5496374A (en) 1978-01-17 1978-01-17 Automatic positioning device

Country Status (1)

Country Link
JP (1) JPS5496374A (enrdf_load_html_response)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59138908U (ja) * 1983-03-08 1984-09-17 東北金属工業株式会社 マ−クセンス式位置決め装置
JPH0612751B2 (ja) * 1983-03-17 1994-02-16 日本精工株式会社 露光装置における位置合わせ装置
JP2880317B2 (ja) * 1991-03-28 1999-04-05 ウシオ電機株式会社 フィルム露光方法
JP3601376B2 (ja) * 1998-12-14 2004-12-15 セイコーエプソン株式会社 電子機器及び電子機器の制御方法
JP3601375B2 (ja) * 1998-12-14 2004-12-15 セイコーエプソン株式会社 携帯用電子機器及び携帯用電子機器の制御方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51120180A (en) * 1975-04-15 1976-10-21 Nippon Telegr & Teleph Corp <Ntt> Pattern printing device
JPS52143773A (en) * 1976-05-26 1977-11-30 Hitachi Ltd Reduction projecting and printing apparatus

Also Published As

Publication number Publication date
JPS5496374A (en) 1979-07-30

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