JPS6238790Y2 - - Google Patents

Info

Publication number
JPS6238790Y2
JPS6238790Y2 JP678483U JP678483U JPS6238790Y2 JP S6238790 Y2 JPS6238790 Y2 JP S6238790Y2 JP 678483 U JP678483 U JP 678483U JP 678483 U JP678483 U JP 678483U JP S6238790 Y2 JPS6238790 Y2 JP S6238790Y2
Authority
JP
Japan
Prior art keywords
fluid
rail
cleaned
chamber
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP678483U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59115485U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP678483U priority Critical patent/JPS59115485U/ja
Publication of JPS59115485U publication Critical patent/JPS59115485U/ja
Application granted granted Critical
Publication of JPS6238790Y2 publication Critical patent/JPS6238790Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Nozzles (AREA)
JP678483U 1983-01-21 1983-01-21 レ−ル状ノズル Granted JPS59115485U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP678483U JPS59115485U (ja) 1983-01-21 1983-01-21 レ−ル状ノズル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP678483U JPS59115485U (ja) 1983-01-21 1983-01-21 レ−ル状ノズル

Publications (2)

Publication Number Publication Date
JPS59115485U JPS59115485U (ja) 1984-08-04
JPS6238790Y2 true JPS6238790Y2 (enExample) 1987-10-02

Family

ID=30138324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP678483U Granted JPS59115485U (ja) 1983-01-21 1983-01-21 レ−ル状ノズル

Country Status (1)

Country Link
JP (1) JPS59115485U (enExample)

Also Published As

Publication number Publication date
JPS59115485U (ja) 1984-08-04

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