JPS6236634B2 - - Google Patents

Info

Publication number
JPS6236634B2
JPS6236634B2 JP54143090A JP14309079A JPS6236634B2 JP S6236634 B2 JPS6236634 B2 JP S6236634B2 JP 54143090 A JP54143090 A JP 54143090A JP 14309079 A JP14309079 A JP 14309079A JP S6236634 B2 JPS6236634 B2 JP S6236634B2
Authority
JP
Japan
Prior art keywords
chamber
damper
wafer
exhaust pipe
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54143090A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5666044A (en
Inventor
Terumi Rokusha
Masatoshi Matsushita
Tatsumi Suganuma
Kensho Kyoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP14309079A priority Critical patent/JPS5666044A/ja
Publication of JPS5666044A publication Critical patent/JPS5666044A/ja
Publication of JPS6236634B2 publication Critical patent/JPS6236634B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP14309079A 1979-11-05 1979-11-05 Semiconductor device Granted JPS5666044A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14309079A JPS5666044A (en) 1979-11-05 1979-11-05 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14309079A JPS5666044A (en) 1979-11-05 1979-11-05 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5666044A JPS5666044A (en) 1981-06-04
JPS6236634B2 true JPS6236634B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-08-07

Family

ID=15330673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14309079A Granted JPS5666044A (en) 1979-11-05 1979-11-05 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5666044A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5950525A (ja) * 1982-09-16 1984-03-23 M Setetsuku Kk フオトレジストの塗布装置
JPS5950438U (ja) * 1982-09-24 1984-04-03 富士通株式会社 レジスト塗布装置
JPS5977223U (ja) * 1982-11-16 1984-05-25 ソニー株式会社 半導体洗浄装置
JPS5995629U (ja) * 1982-12-20 1984-06-28 株式会社東芝 レジスト塗布装置
JPS6088429A (ja) * 1983-10-20 1985-05-18 Fuji Electric Co Ltd 半導体塗布拡散方法
JPS61157380A (ja) * 1984-12-28 1986-07-17 Fujitsu Ltd 回転処理装置
JPS61160933A (ja) * 1985-01-08 1986-07-21 Nec Corp 現像処理装置
JPS61251135A (ja) * 1985-04-30 1986-11-08 Toshiba Corp 自動現像装置
JPS62117323A (ja) * 1985-11-18 1987-05-28 Toshiba Corp 自動現像装置
JPH0611023B2 (ja) * 1986-12-29 1994-02-09 東京エレクトロン株式会社 現像方法
JPS63119236A (ja) * 1987-10-08 1988-05-23 Fujitsu Ltd レジスト塗布方法
JPH01244617A (ja) * 1988-03-25 1989-09-29 Tokyo Electron Ltd レジスト塗布方法
JP2588854B2 (ja) * 1995-01-27 1997-03-12 東京エレクトロン株式会社 現像装置
JP2006216803A (ja) * 2005-02-04 2006-08-17 Daikin Ind Ltd 処理装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53166861U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-06-01 1978-12-27
JPS542376U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-06-08 1979-01-09
JPS5612206U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-07-06 1981-02-02

Also Published As

Publication number Publication date
JPS5666044A (en) 1981-06-04

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