JPH0546895B2 - - Google Patents
Info
- Publication number
- JPH0546895B2 JPH0546895B2 JP5286486A JP5286486A JPH0546895B2 JP H0546895 B2 JPH0546895 B2 JP H0546895B2 JP 5286486 A JP5286486 A JP 5286486A JP 5286486 A JP5286486 A JP 5286486A JP H0546895 B2 JPH0546895 B2 JP H0546895B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- decomposer
- vapor
- decomposition
- conduit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 claims description 51
- 238000000354 decomposition reaction Methods 0.000 claims description 30
- 239000003795 chemical substances by application Substances 0.000 claims description 14
- 239000007921 spray Substances 0.000 claims description 3
- 239000012535 impurity Substances 0.000 description 6
- 239000011550 stock solution Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5286486A JPS62209335A (ja) | 1986-03-10 | 1986-03-10 | 薄膜分解装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5286486A JPS62209335A (ja) | 1986-03-10 | 1986-03-10 | 薄膜分解装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62209335A JPS62209335A (ja) | 1987-09-14 |
| JPH0546895B2 true JPH0546895B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-07-15 |
Family
ID=12926733
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5286486A Granted JPS62209335A (ja) | 1986-03-10 | 1986-03-10 | 薄膜分解装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62209335A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH066398U (ja) * | 1992-02-05 | 1994-01-25 | 東洋運搬機株式会社 | サイドクランプ装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102379619B1 (ko) * | 2014-05-30 | 2022-03-25 | 가부시키가이샤 스미카 분세키 센터 | 분석용 샘플의 회수 방법 및 그 이용 |
-
1986
- 1986-03-10 JP JP5286486A patent/JPS62209335A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH066398U (ja) * | 1992-02-05 | 1994-01-25 | 東洋運搬機株式会社 | サイドクランプ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62209335A (ja) | 1987-09-14 |
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