JPS623581B2 - - Google Patents

Info

Publication number
JPS623581B2
JPS623581B2 JP52044449A JP4444977A JPS623581B2 JP S623581 B2 JPS623581 B2 JP S623581B2 JP 52044449 A JP52044449 A JP 52044449A JP 4444977 A JP4444977 A JP 4444977A JP S623581 B2 JPS623581 B2 JP S623581B2
Authority
JP
Japan
Prior art keywords
cartridge
plate
rotary table
pusher
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52044449A
Other languages
English (en)
Japanese (ja)
Other versions
JPS53129974A (en
Inventor
Hisao Seki
Toshio Nonaka
Kimio Muramatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4444977A priority Critical patent/JPS53129974A/ja
Publication of JPS53129974A publication Critical patent/JPS53129974A/ja
Publication of JPS623581B2 publication Critical patent/JPS623581B2/ja
Granted legal-status Critical Current

Links

JP4444977A 1977-04-20 1977-04-20 Palte form object transfer device Granted JPS53129974A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4444977A JPS53129974A (en) 1977-04-20 1977-04-20 Palte form object transfer device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4444977A JPS53129974A (en) 1977-04-20 1977-04-20 Palte form object transfer device

Publications (2)

Publication Number Publication Date
JPS53129974A JPS53129974A (en) 1978-11-13
JPS623581B2 true JPS623581B2 (enExample) 1987-01-26

Family

ID=12691790

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4444977A Granted JPS53129974A (en) 1977-04-20 1977-04-20 Palte form object transfer device

Country Status (1)

Country Link
JP (1) JPS53129974A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57192020A (en) * 1981-05-20 1982-11-26 Mitsubishi Electric Corp Stacking tool for thin plate body
JPH0666378B2 (ja) * 1986-02-21 1994-08-24 株式会社日立製作所 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS53129974A (en) 1978-11-13

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