JPS6234152B2 - - Google Patents

Info

Publication number
JPS6234152B2
JPS6234152B2 JP55082409A JP8240980A JPS6234152B2 JP S6234152 B2 JPS6234152 B2 JP S6234152B2 JP 55082409 A JP55082409 A JP 55082409A JP 8240980 A JP8240980 A JP 8240980A JP S6234152 B2 JPS6234152 B2 JP S6234152B2
Authority
JP
Japan
Prior art keywords
layer
silicon oxide
film
substrate
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55082409A
Other languages
English (en)
Japanese (ja)
Other versions
JPS577939A (en
Inventor
Noboru Okuyama
Takamichi Narita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP8240980A priority Critical patent/JPS577939A/ja
Publication of JPS577939A publication Critical patent/JPS577939A/ja
Publication of JPS6234152B2 publication Critical patent/JPS6234152B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/60—

Landscapes

  • Formation Of Insulating Films (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP8240980A 1980-06-18 1980-06-18 Manufacture of semiconductor device Granted JPS577939A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8240980A JPS577939A (en) 1980-06-18 1980-06-18 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8240980A JPS577939A (en) 1980-06-18 1980-06-18 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS577939A JPS577939A (en) 1982-01-16
JPS6234152B2 true JPS6234152B2 (member.php) 1987-07-24

Family

ID=13773785

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8240980A Granted JPS577939A (en) 1980-06-18 1980-06-18 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS577939A (member.php)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4573706A (en) * 1984-02-15 1986-03-04 Breed Corporation Passenger compartment sensor requiring substantial velocity change
US4666182A (en) * 1984-02-15 1987-05-19 Breed Corporation Non crush zone-all mechanical damped sensor
SE8500679L (sv) * 1984-02-15 1985-08-16 Breed Corp Sensor for aktivering av krocksyddssystem for fordonspassagerare
JPH07461B2 (ja) * 1986-12-19 1995-01-11 本田技研工業株式会社 車輌用加速度検知装置
DE9010727U1 (de) * 1990-07-18 1990-10-11 Herberts Gmbh, 5600 Wuppertal Absaughaube für Lacktrommeln
JP2538722B2 (ja) * 1991-06-20 1996-10-02 株式会社半導体プロセス研究所 半導体装置の製造方法
JPH05213152A (ja) * 1991-09-09 1993-08-24 Aisin Seiki Co Ltd 衝撃感知装置

Also Published As

Publication number Publication date
JPS577939A (en) 1982-01-16

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