JPS623386Y2 - - Google Patents

Info

Publication number
JPS623386Y2
JPS623386Y2 JP1982156330U JP15633082U JPS623386Y2 JP S623386 Y2 JPS623386 Y2 JP S623386Y2 JP 1982156330 U JP1982156330 U JP 1982156330U JP 15633082 U JP15633082 U JP 15633082U JP S623386 Y2 JPS623386 Y2 JP S623386Y2
Authority
JP
Japan
Prior art keywords
foreign matter
pot
matter removal
vapor deposition
removal plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982156330U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5961270U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15633082U priority Critical patent/JPS5961270U/ja
Publication of JPS5961270U publication Critical patent/JPS5961270U/ja
Application granted granted Critical
Publication of JPS623386Y2 publication Critical patent/JPS623386Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP15633082U 1982-10-18 1982-10-18 メツキ用蒸着鍋の異物除去装置 Granted JPS5961270U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15633082U JPS5961270U (ja) 1982-10-18 1982-10-18 メツキ用蒸着鍋の異物除去装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15633082U JPS5961270U (ja) 1982-10-18 1982-10-18 メツキ用蒸着鍋の異物除去装置

Publications (2)

Publication Number Publication Date
JPS5961270U JPS5961270U (ja) 1984-04-21
JPS623386Y2 true JPS623386Y2 (en:Method) 1987-01-26

Family

ID=30344992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15633082U Granted JPS5961270U (ja) 1982-10-18 1982-10-18 メツキ用蒸着鍋の異物除去装置

Country Status (1)

Country Link
JP (1) JPS5961270U (en:Method)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3323488A (en) * 1962-12-21 1967-06-06 Nat Res Corp Vapor coating apparatus employing crucible scraping means

Also Published As

Publication number Publication date
JPS5961270U (ja) 1984-04-21

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