JPS54127878A - Deposition source for electronic beam deposition apparatus - Google Patents

Deposition source for electronic beam deposition apparatus

Info

Publication number
JPS54127878A
JPS54127878A JP3553878A JP3553878A JPS54127878A JP S54127878 A JPS54127878 A JP S54127878A JP 3553878 A JP3553878 A JP 3553878A JP 3553878 A JP3553878 A JP 3553878A JP S54127878 A JPS54127878 A JP S54127878A
Authority
JP
Japan
Prior art keywords
concavity
crucible
deposition
deposition material
deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3553878A
Other languages
Japanese (ja)
Inventor
Masachika Narushima
Akihiro Tomosawa
Takao Nagasaki
Kimio Muramatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3553878A priority Critical patent/JPS54127878A/en
Publication of JPS54127878A publication Critical patent/JPS54127878A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To make easier the removal operation of deposited material as well as enhance the power efficiency and deposition speed by providing detachably a cylind- rical part for controlling the evaporation direction of deposition material at the opening end or its neighboring position of the concavity of hearth filled with deposition material. CONSTITUTION:The liner crucible 32 is provided detachably in the inside of the concavity 12 of the hearth 10. When the electronic beam 22 is irradiated onto the deposition material 16 in the crucible 32 for heating, the fused portion 16A is formed in the greater part of the concavity but because the bottom of the concavity 12 is exposed to the air, the scull 16B is formed on the bottom by the water cooling action of the piping 18. However, the formation of scull is small on the bottom alone of the concavity, so that the power efficiency and the evaporation speed become greater. Also, because the position where the deposition material 30 is adhered is in the inside of the cylindrical part 32B of the crucible 32, the removal of the deposited material can be easily made simply by taking out and cleaning the crucible 32 at the time when a certain amount of deposited material 30 deposited.
JP3553878A 1978-03-29 1978-03-29 Deposition source for electronic beam deposition apparatus Pending JPS54127878A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3553878A JPS54127878A (en) 1978-03-29 1978-03-29 Deposition source for electronic beam deposition apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3553878A JPS54127878A (en) 1978-03-29 1978-03-29 Deposition source for electronic beam deposition apparatus

Publications (1)

Publication Number Publication Date
JPS54127878A true JPS54127878A (en) 1979-10-04

Family

ID=12444501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3553878A Pending JPS54127878A (en) 1978-03-29 1978-03-29 Deposition source for electronic beam deposition apparatus

Country Status (1)

Country Link
JP (1) JPS54127878A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0497848U (en) * 1991-01-10 1992-08-25
JPH0593263A (en) * 1991-09-30 1993-04-16 Shinkuron:Kk Hearth liner and deposition method
EP1288331A1 (en) * 2001-09-03 2003-03-05 Hoya Corporation Vapor deposition crucible opened on both sides
KR101186956B1 (en) 2010-04-28 2012-09-28 (주)도 은 Vessel of coating material for vacuum coating

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0497848U (en) * 1991-01-10 1992-08-25
JPH0593263A (en) * 1991-09-30 1993-04-16 Shinkuron:Kk Hearth liner and deposition method
EP1288331A1 (en) * 2001-09-03 2003-03-05 Hoya Corporation Vapor deposition crucible opened on both sides
KR101186956B1 (en) 2010-04-28 2012-09-28 (주)도 은 Vessel of coating material for vacuum coating

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