KR101186956B1

KR101186956B1 - Vessel of coating material for vacuum coating

Info

Publication number: KR101186956B1
Application number: KR20100039267A
Authority: KR
Inventors: 신도현
Original assignee: (주)도 은
Priority date: 2010-04-28
Filing date: 2010-04-28
Publication date: 2012-09-28
Also published as: KR20110119871A

Abstract

The present invention relates to a carrier container for vacuum deposition, and more particularly, when the carrier is accommodated in the carrier container, most of the surface of the carrier is exposed so that the coating material is vaporized in many parts of the carrier surface, and further, the vaporizer of the coating material. The base 12 forming the bottom surface and the wall portion 14 extending upward from the edge of the base 12 to form a wall surface for the purpose of providing direction to the upper portion of the deposition chamber in which the deposit is installed. The inner surface of the wall portion 14 is spaced apart from the outer surface of the carrier is provided with a vacuum deposition carrier container formed space (18).
As a result, the coating material is vaporized at the same time on the upper and side surfaces of the carrier, so that the deposition process can be performed in a short time, the deposition rate is high, the vapor deposition rate is low, and the film is formed with a uniform thickness over the entire surface of the deposit. can do.

Description

Carrier container for vacuum deposition {VESSEL OF COATING MATERIAL FOR VACUUM COATING}

The present invention relates to a carrier container for vacuum deposition containing a porous carrier containing a coating material used in vacuum deposition, in particular a vacuum deposition for forming a curved surface so that the inner surface of the container wall spaced apart from the outer surface of the carrier to form a space It relates to a carrier container.

Vacuum deposition is used to improve the properties by coating specific materials on the surface of deposits such as optical devices. For example, vapor deposition is performed on transparent synthetic resin surfaces such as plastic to improve light transmittance or water repellent coating on glass surfaces. Dew condensation or water droplets are used to flow down, and in addition to the surface of the synthetic resin is a technology that is used to give a beauty through the coating of a metallic material.

In general, vacuum deposition indirectly heats an evaporation source by heating a housing of a metal material on which an evaporation source is seated by an electric resistance heat in a vacuum environment, wherein the gas emitted from the evaporation source is deposited using a difference in the saturated vapor pressure between the low temperature deposits. To the surface of the

In recent years, an organic coating is formed on an inorganic thin film deposited on the surface of an object to be treated such as a lens, and a surface treatment method for imparting water repellency, oil repellency, and dust resistance has been widely performed. Gasification at low pressure (vacuum environment), and the method of forming an organic coating on the inorganic coating film in a vacuum chamber are widely used.

In this regard, the present inventors made a wire rod of a metal selected from the group consisting of glass fiber, iron, copper, and stainless steel having a diameter of 0.003 to 0.1 mm, such as Korean Patent No. 10-0528892 (see Patent Document), to 80 to 1100 kg / cm 2. After pressurizing and molding, the water-repellent and oil-repellent treatment carriers used in a vacuum environment having a Mohs hardness of 1 to 4, a porosity of 5 to 48%, and preferably 5 to 30%, obtained by heat treatment at 250 to 700 ° C are proposed. There is a bar.

The vapor deposition method using the support | carrier of the said patent document is as follows.

After incorporating the carrier into a metallic container with an open top, putting the vapor deposition material in the carrier and heating the container by electric resistance or electron beam in a vapor deposition chamber in a vacuum environment, the coating material is vaporized to form an organic coating on the surface of the deposit. do.

At this time, since the carrier of the patent document itself was formed by pressing the wire rod, uniform pores were formed on the entire surface, and the size of the pores was almost constant, the porosity was constant, and it could be reused after the simple cleaning and drying process after use. There are advantages such as being able.

However, when using a carrier having the above characteristics in a general carrier container there is a disadvantage that does not exhibit the characteristics of the carrier to the maximum.

In other words, when the carrier is introduced into a general carrier container (opened top), only the top surface of the carrier is exposed and the side is closed by the wall of the carrier container so that the vaporizer of the coating material volatilizes only into the pores formed on the top surface of the carrier. As a result, a large amount of deposition time is required and the direction of the vaporizer can not be controlled upward, so that the thickness of the deposited film is not uniform.

Republic of Korea Patent Registration No. 10-0528892

An object of the present invention for solving the above problems is that the coating material is exposed to a large amount of the surface of the carrier by exposing most of the carrier surface when the carrier is accommodated in the carrier container when the wire rod is pressurized and deposited using the molded carrier. It is to provide a carrier container for vacuum evaporation to be vaporized in the part.

Another object of the present invention is to provide a carrier container for vacuum deposition which can direct the vaporization of the coating material upwards to the top of the deposition chamber in which the deposit is installed.

The present invention for achieving the above object is a vacuum deposition carrier container with an open top to accommodate a carrier containing a coating material for vacuum deposition, the base 12 forming the bottom surface, the edge of the base 12 It is made of a wall portion 14 extending upwards to form a wall surface, the inner surface of the wall portion 14 is spaced apart from the outer surface of the carrier, characterized in that the space 18 is formed.

In a preferred form, the inner surface of the wall portion 14 may be a curved surface 14a, wherein the bent portion of the curved surface 14a is in a vertical direction, or the curved surface 14a is zigzag in plan view. It may be bent into a star shape.

In another preferred form, the base 12 may be any one of circular, elliptical and polygonal in plan view.

In another preferred form, a diffusion tube 16 extending upwardly inclined outward of the wall portion may be further formed at an upper end of the wall portion 14.

According to the present invention, since the carrier contained in the carrier container is exposed to the side including the top surface, the coating material is vaporized at the same time as the top and side of the carrier, so that the deposition process can be effectively performed in a short time, so that mass production is possible. .

In addition, since the wall of the carrier container has a vertical orientation, the vaporizer vaporizes toward the upper side of the deposition chamber where the deposit is located, so that the deposition rate is high, the vaporizer loss rate is low, and the thickness of the deposit is uniform to the entire surface. Since the film is formed, there is an advantage that the defect rate can be minimized.

1 is a perspective view of a carrier container for vacuum deposition according to an embodiment of the present invention.
Figure 2 is a cross-sectional view of the carrier container for vacuum deposition according to an embodiment of the present invention.
3 is a plan view of a carrier container for vacuum deposition according to an embodiment of the present invention.
Figure 4 is a state diagram used in the carrier container for vacuum deposition according to an embodiment of the present invention.

While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims. However, this is not intended to limit the present invention only to the illustrated form, and the spirit and scope of the present invention should be understood to include ordinary changes, equivalents, and substitutes of the illustrated forms.

1 is a perspective view of a carrier container for vacuum deposition according to an embodiment of the present invention, Figure 2 is a cross-sectional view of the carrier container for vacuum deposition according to an embodiment of the present invention, Figure 3 is an embodiment of the present invention Is a plan view of a carrier container for vacuum deposition.

As shown in Figures 1 to 3, the carrier container 10 for vacuum deposition according to the present invention, the upper portion is open to accommodate the carrier 20 therein, the bottom of the carrier container 10 It comprises a surface forming a base 12, the edge of the base 12 is configured to include a wall portion 14 extending upward to form a wall surface of the carrier container.

The carrier container 10 may be made of a metal material, and the carrier 20 may be molded by pressing the wire rod as in the patent document as the coating material 30 is embedded.

At this time, the inner surface of the wall portion 14 is spaced apart from the outer surface of the carrier 20 when the carrier 20 is accommodated in the carrier container 10 to form a space 18, in this case embedded in the carrier 20 When the coated material 30 is vaporized by heating, a large amount of the coating material is vaporized in a short time since it is also vaporized into the space 18 located on the side surface as well as the upper surface of the carrier 20.

As a preferred embodiment for forming the space 18, a bent portion 14a may be formed on the inner surface of the wall portion 14 to form a bend.

More specifically, the bent portion forming the curved surface 14a may be bent in a vertical direction as shown in FIG. 1, or the curved surface 14a may be bent in a zigzag form as shown in FIG. 3 to form a star shape in plan view. can do.

In this case, the inner bent portion of the curved surface 14a is in linear contact with the outer surface of the carrier 20, and a space 18 is formed between the inner surface of the wall portion 14 and the outer surface of the carrier 20 by the outer bent portion.

According to the present invention, it is to be understood that the object of the present invention is achieved even if only one space 18 is provided in a part of the carrier, not the entire outer surface thereof. Therefore, the space 18 may be installed at least one or a plurality.

In addition, the illustrated carrier container 10 is generally cylindrical in shape, but unlike the illustrated figure, the carrier container 10 may be in the shape of a square cylinder, may be elliptical, or may be a pentagon, a hexagon, or another polygon. The shape of the carrier container 10 is determined according to the shape of the base 12 constituting the bottom surface. Thus, the present invention provides a condition in which the space 18 is formed between the outer surface of the carrier 20 and the inner surface of the wall portion 14. In the base 12 can be manufactured in a circular, elliptical or polygonal in plan view.

As a preferred embodiment of the carrier container 10, the present invention includes a diffusion tube 16 formed on the top of the wall portion 14, the diffusion tube 16 to be inclined in the outward direction of the wall portion 14 It may have a form extending upward from the wall (14).

4 is a view showing a state of use of the vacuum container carrier container according to an embodiment of the present invention, the present invention will be further embodied through the following description.

3 and 4, the carrier container 10 of the present invention is placed on a heating source 50 installed in the deposition chamber 40, and the coating material 30 is formed inside the carrier container 10. An embedded carrier 20 is accommodated, and a deposit 60 is provided at an upper portion inside the deposition chamber 40.

In this state, when the inside of the deposition chamber 40 is formed in a vacuum or low pressure environment, and the heating source 50 is heated by irradiating an electric resistance or an electron beam, the coating material 30 in the carrier 20 is vaporized, and the vaporizer Is discharged into the space 18 through the side of the carrier 20, including the top surface of the carrier 20.

At this time, when the bent portion constituting the curved surface 14a is bent in the vertical direction as described above, or bent in a star shape in plan view, the vaporizer that reaches the space 18 is moved upward by the vertical bent portion. Since the vaporizer is volatilized toward the deposit 60, the vaporizer is fixed to the surface of the deposit.

In addition, in the case where the diffusion tube 16 is formed above the wall portion 14 of the carrier container 10, the vaporizer in the space 18 has a diffusibility that diffuses outward with upward direction by the curved surface 14a. Even if the surface of the deposit 60 has a large or small size of the deposit 60, it is possible to form a deposition layer having a uniform thickness over the entire surface of the deposit.

While the above has been shown and described with respect to preferred embodiments of the present invention, the present invention is not limited to the specific embodiments described above, it is usually in the technical field to which the invention belongs without departing from the spirit of the invention claimed in the claims. Various modifications can be made by those skilled in the art, and such modifications should not be individually understood from the technical spirit or prospect of the present invention.

10 ... Carrier Container 12 ... Base
14 ... wall 14a ... curved surface
16 ... diffuser 18 ... space
20 ... Carrier 30 ... Coating Material
30a ... Vaporizer 40 ... Deposition Chamber
50 ... heating source 60 ... deposit

Claims

A vacuum deposition carrier container having an open top for accommodating a carrier containing a coating material for vacuum deposition.
The base 12 forming the bottom surface,
Consists of a wall portion 14 extending upward from the edge of the base 12 to form a wall surface,
The inner surface of the wall portion 14 forms a curved surface 14a having a plurality of vertical bending portions, so that a space 18 is formed between the outer surface of the carrier and the inner surface of the wall portion. Carrier container.

delete

The method according to claim 1,
The curved surface (14a) is in a zig-zag shape, characterized in that curved in a star shape in planar observation carrier container for vacuum side.

The method according to claim 1,
The base 12 is a carrier container for vacuum deposition, characterized in that any one of a circular, elliptical, polygonal in plan view.

The method according to any one of claims 1, 4, 5,
The carrier container for vacuum deposition, characterized in that the upper end of the wall portion 14 is further formed with a diffusion tube 16 extending to be inclined upward toward the outside of the wall portion.