JPS6231622B2 - - Google Patents
Info
- Publication number
- JPS6231622B2 JPS6231622B2 JP16292180A JP16292180A JPS6231622B2 JP S6231622 B2 JPS6231622 B2 JP S6231622B2 JP 16292180 A JP16292180 A JP 16292180A JP 16292180 A JP16292180 A JP 16292180A JP S6231622 B2 JPS6231622 B2 JP S6231622B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- rotary
- rotary pot
- resist liquid
- spin coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 24
- 239000011248 coating agent Substances 0.000 claims description 12
- 238000000576 coating method Methods 0.000 claims description 12
- 238000004528 spin coating Methods 0.000 description 15
- 230000003749 cleanliness Effects 0.000 description 4
- 101100298222 Caenorhabditis elegans pot-1 gene Proteins 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
- B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16292180A JPS5787862A (en) | 1980-11-19 | 1980-11-19 | Rotary coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16292180A JPS5787862A (en) | 1980-11-19 | 1980-11-19 | Rotary coating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5787862A JPS5787862A (en) | 1982-06-01 |
| JPS6231622B2 true JPS6231622B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-07-09 |
Family
ID=15763758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16292180A Granted JPS5787862A (en) | 1980-11-19 | 1980-11-19 | Rotary coating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5787862A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5933453A (ja) * | 1982-08-19 | 1984-02-23 | Toshiba Corp | レジスト塗布装置 |
| JPH0669545B2 (ja) * | 1987-11-23 | 1994-09-07 | タツモ株式会社 | 塗布装置 |
| JP2603431B2 (ja) * | 1993-12-15 | 1997-04-23 | 東京応化工業株式会社 | 塗布装置 |
-
1980
- 1980-11-19 JP JP16292180A patent/JPS5787862A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5787862A (en) | 1982-06-01 |