JPS62291001A - 薄膜サ−ミスタとその製造方法 - Google Patents

薄膜サ−ミスタとその製造方法

Info

Publication number
JPS62291001A
JPS62291001A JP13461886A JP13461886A JPS62291001A JP S62291001 A JPS62291001 A JP S62291001A JP 13461886 A JP13461886 A JP 13461886A JP 13461886 A JP13461886 A JP 13461886A JP S62291001 A JPS62291001 A JP S62291001A
Authority
JP
Japan
Prior art keywords
thermistor
thin film
comb
shaped pattern
pattern electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13461886A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0354841B2 (enrdf_load_stackoverflow
Inventor
道井　敏
信善 竹内
直樹 原田
英一 真壁
健夫 山田
大高　晋一郎
鈴木　友信
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Engineering Corp
Unizon KK
Original Assignee
Unizon KK
NKK Corp
Nippon Kokan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unizon KK, NKK Corp, Nippon Kokan Ltd filed Critical Unizon KK
Priority to JP13461886A priority Critical patent/JPS62291001A/ja
Publication of JPS62291001A publication Critical patent/JPS62291001A/ja
Publication of JPH0354841B2 publication Critical patent/JPH0354841B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thermistors And Varistors (AREA)
JP13461886A 1986-06-10 1986-06-10 薄膜サ−ミスタとその製造方法 Granted JPS62291001A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13461886A JPS62291001A (ja) 1986-06-10 1986-06-10 薄膜サ−ミスタとその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13461886A JPS62291001A (ja) 1986-06-10 1986-06-10 薄膜サ−ミスタとその製造方法

Publications (2)

Publication Number Publication Date
JPS62291001A true JPS62291001A (ja) 1987-12-17
JPH0354841B2 JPH0354841B2 (enrdf_load_stackoverflow) 1991-08-21

Family

ID=15132598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13461886A Granted JPS62291001A (ja) 1986-06-10 1986-06-10 薄膜サ−ミスタとその製造方法

Country Status (1)

Country Link
JP (1) JPS62291001A (enrdf_load_stackoverflow)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08114474A (ja) * 1994-10-17 1996-05-07 Kanagawa Pref Gov 流量計センサ
JP2008244344A (ja) * 2007-03-28 2008-10-09 Mitsubishi Materials Corp 薄膜サーミスタ素子及び薄膜サーミスタ素子の製造方法
JP2008258386A (ja) * 2007-04-04 2008-10-23 Mitsubishi Materials Corp 薄膜サーミスタ及び薄膜サーミスタの製造方法
JP2008270447A (ja) * 2007-04-19 2008-11-06 Mitsubishi Materials Corp 薄型複合素子及びその製造方法
US8373535B2 (en) 2001-01-26 2013-02-12 Quality Thermistor, Inc. Thermistor and method of manufacture
JP2013211436A (ja) * 2012-03-30 2013-10-10 Mitsubishi Materials Corp 温度調節機能付き電池
JP2013211433A (ja) * 2012-03-30 2013-10-10 Mitsubishi Materials Corp フィルム型サーミスタセンサ
JP2013211434A (ja) * 2012-03-30 2013-10-10 Mitsubishi Materials Corp サーミスタ用金属窒化物膜及びその製造方法並びにフィルム型サーミスタセンサ
US10481006B1 (en) 2019-01-30 2019-11-19 King Saud University Thermal sensing layer for microbolometer and method of making the same
US10488272B2 (en) 2016-01-29 2019-11-26 Mitsubishi Materials Corporation Temperature sensor

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8584857B2 (en) 2009-03-13 2013-11-19 Mitsubishi Shoji Packaging Corporation Card package
US9659691B2 (en) 2012-07-13 2017-05-23 Semitec Corporation Thin-film thermistor element and method of manufacturing the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5798827A (en) * 1980-12-12 1982-06-19 Matsushita Electric Ind Co Ltd Thin film thermistor
JPS61116631A (ja) * 1984-11-12 1986-06-04 Nok Corp 薄膜サ−ミスタおよびその製造法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5798827A (en) * 1980-12-12 1982-06-19 Matsushita Electric Ind Co Ltd Thin film thermistor
JPS61116631A (ja) * 1984-11-12 1986-06-04 Nok Corp 薄膜サ−ミスタおよびその製造法

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08114474A (ja) * 1994-10-17 1996-05-07 Kanagawa Pref Gov 流量計センサ
US8373535B2 (en) 2001-01-26 2013-02-12 Quality Thermistor, Inc. Thermistor and method of manufacture
JP2008244344A (ja) * 2007-03-28 2008-10-09 Mitsubishi Materials Corp 薄膜サーミスタ素子及び薄膜サーミスタ素子の製造方法
JP2008258386A (ja) * 2007-04-04 2008-10-23 Mitsubishi Materials Corp 薄膜サーミスタ及び薄膜サーミスタの製造方法
JP2008270447A (ja) * 2007-04-19 2008-11-06 Mitsubishi Materials Corp 薄型複合素子及びその製造方法
JP2013211436A (ja) * 2012-03-30 2013-10-10 Mitsubishi Materials Corp 温度調節機能付き電池
JP2013211433A (ja) * 2012-03-30 2013-10-10 Mitsubishi Materials Corp フィルム型サーミスタセンサ
JP2013211434A (ja) * 2012-03-30 2013-10-10 Mitsubishi Materials Corp サーミスタ用金属窒化物膜及びその製造方法並びにフィルム型サーミスタセンサ
US10488272B2 (en) 2016-01-29 2019-11-26 Mitsubishi Materials Corporation Temperature sensor
US10481006B1 (en) 2019-01-30 2019-11-19 King Saud University Thermal sensing layer for microbolometer and method of making the same
US10648865B1 (en) 2019-01-30 2020-05-12 King Saud University Thermal sensing layer for microbolometer and method of making the same

Also Published As

Publication number Publication date
JPH0354841B2 (enrdf_load_stackoverflow) 1991-08-21

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