JPS6227725B2 - - Google Patents

Info

Publication number
JPS6227725B2
JPS6227725B2 JP55069817A JP6981780A JPS6227725B2 JP S6227725 B2 JPS6227725 B2 JP S6227725B2 JP 55069817 A JP55069817 A JP 55069817A JP 6981780 A JP6981780 A JP 6981780A JP S6227725 B2 JPS6227725 B2 JP S6227725B2
Authority
JP
Japan
Prior art keywords
core tube
furnace core
holding jig
substrate holding
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55069817A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56165317A (en
Inventor
Kyoshi Izumida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6981780A priority Critical patent/JPS56165317A/ja
Publication of JPS56165317A publication Critical patent/JPS56165317A/ja
Publication of JPS6227725B2 publication Critical patent/JPS6227725B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P10/00—
JP6981780A 1980-05-26 1980-05-26 Manufacture of semiconductor device Granted JPS56165317A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6981780A JPS56165317A (en) 1980-05-26 1980-05-26 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6981780A JPS56165317A (en) 1980-05-26 1980-05-26 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS56165317A JPS56165317A (en) 1981-12-18
JPS6227725B2 true JPS6227725B2 (show.php) 1987-06-16

Family

ID=13413684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6981780A Granted JPS56165317A (en) 1980-05-26 1980-05-26 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS56165317A (show.php)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0650756B2 (ja) * 1982-08-27 1994-06-29 東京応化工業株式会社 薄板状被処理物の加熱処理装置
JPS58110034A (ja) * 1981-12-24 1983-06-30 Fujitsu Ltd 縦型気相エピタキシヤル装置
JPS60140817A (ja) * 1983-12-28 1985-07-25 Fujitsu Ltd 半導体装置の製造方法
JPS61111524A (ja) * 1984-11-06 1986-05-29 Denkoo:Kk 縦形半導体熱処理炉
JPS60182728A (ja) * 1984-02-29 1985-09-18 Fujitsu Ltd 縦型炉
JPS60213022A (ja) * 1984-04-09 1985-10-25 Tekunisuko:Kk 縦型支持具
JPS6112024A (ja) * 1984-06-27 1986-01-20 Fujitsu Ltd 縦型加熱炉
JPH0220830Y2 (show.php) * 1985-11-05 1990-06-06
JPS62122123A (ja) * 1985-11-21 1987-06-03 Toshiba Corp 縦型熱処理装置
JPS62130534A (ja) * 1985-12-02 1987-06-12 Deisuko Saiyaa Japan:Kk 縦型ウエ−ハ処理装置のためのウエ−ハ搬送装置
JPH0610674Y2 (ja) * 1988-11-28 1994-03-16 株式会社福井信越石英 ウエーハ支持装置

Also Published As

Publication number Publication date
JPS56165317A (en) 1981-12-18

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