JPS62265172A - 炭化けい素焼結体の製造方法 - Google Patents

炭化けい素焼結体の製造方法

Info

Publication number
JPS62265172A
JPS62265172A JP61108273A JP10827386A JPS62265172A JP S62265172 A JPS62265172 A JP S62265172A JP 61108273 A JP61108273 A JP 61108273A JP 10827386 A JP10827386 A JP 10827386A JP S62265172 A JPS62265172 A JP S62265172A
Authority
JP
Japan
Prior art keywords
silicon carbide
boron
sintered body
sintering
sintered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61108273A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0583512B2 (enrdf_load_stackoverflow
Inventor
高見沢　稔
章 林田
延明 浦里
本宮　達彦
徳重　裕士
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP61108273A priority Critical patent/JPS62265172A/ja
Publication of JPS62265172A publication Critical patent/JPS62265172A/ja
Publication of JPH0583512B2 publication Critical patent/JPH0583512B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP61108273A 1986-05-12 1986-05-12 炭化けい素焼結体の製造方法 Granted JPS62265172A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61108273A JPS62265172A (ja) 1986-05-12 1986-05-12 炭化けい素焼結体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61108273A JPS62265172A (ja) 1986-05-12 1986-05-12 炭化けい素焼結体の製造方法

Publications (2)

Publication Number Publication Date
JPS62265172A true JPS62265172A (ja) 1987-11-18
JPH0583512B2 JPH0583512B2 (enrdf_load_stackoverflow) 1993-11-26

Family

ID=14480464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61108273A Granted JPS62265172A (ja) 1986-05-12 1986-05-12 炭化けい素焼結体の製造方法

Country Status (1)

Country Link
JP (1) JPS62265172A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002060274A (ja) * 2000-08-11 2002-02-26 Sumitomo Osaka Cement Co Ltd 高周波透過材料およびその製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5364214A (en) * 1976-11-22 1978-06-08 Carborundum Co Method of making high density silicon carbide products
JPS5891081A (ja) * 1981-11-25 1983-05-30 住友電気工業株式会社 非酸化物系セラミツクスの製造法
JPH0256309A (ja) * 1988-08-22 1990-02-26 Nippon Eranko Kk 粒状物搬送装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5364214A (en) * 1976-11-22 1978-06-08 Carborundum Co Method of making high density silicon carbide products
JPS5891081A (ja) * 1981-11-25 1983-05-30 住友電気工業株式会社 非酸化物系セラミツクスの製造法
JPH0256309A (ja) * 1988-08-22 1990-02-26 Nippon Eranko Kk 粒状物搬送装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002060274A (ja) * 2000-08-11 2002-02-26 Sumitomo Osaka Cement Co Ltd 高周波透過材料およびその製造方法

Also Published As

Publication number Publication date
JPH0583512B2 (enrdf_load_stackoverflow) 1993-11-26

Similar Documents

Publication Publication Date Title
KR100487262B1 (ko) 탄화규소 소결체 및 그의 제조방법
US4701427A (en) Sintered silicon carbide ceramic body of high electrical resistivity
JPH0256309B2 (enrdf_load_stackoverflow)
JP2002326876A (ja) 炭化ケイ素粉末及びその製造方法並びに炭化ケイ素焼結体
JP4595153B2 (ja) 炭化ケイ素体およびその製造方法
JPS62288167A (ja) 炭化けい素焼結体の製造方法
JPH1067565A (ja) 炭化ケイ素焼結体及びその製造方法
JPS638261A (ja) 多結晶炭化ケイ素からの電気絶縁性基体材料と、アイソスタチツク熱間圧縮によるその製造方法
JPS62265172A (ja) 炭化けい素焼結体の製造方法
JPH1179840A (ja) 炭化ケイ素焼結体
JPH04128369A (ja) 炭化珪素スパッタリング用ターゲット及びその製造方法
JPS60131863A (ja) 電気絶縁性炭化けい素焼結体
JPS62256764A (ja) 炭化けい素焼結体の製造方法
JPS6328873B2 (enrdf_load_stackoverflow)
JPH0551554B2 (enrdf_load_stackoverflow)
JPS638265A (ja) 複合焼結体の製造方法
JPS62275064A (ja) 炭化けい素焼結体の製造方法
JP5130099B2 (ja) 炭化ケイ素焼結体の製造方法
JPH04130061A (ja) 炭化珪素電極及びその製造方法
JPS62128913A (ja) 炭化けい素粉末の製造方法
JPS61205665A (ja) 電気絶縁性基板およびその製造方法
JPS616178A (ja) 超微粒子状炭化けい素焼結体の製造方法
JPS5891060A (ja) 炭化珪素質焼結体の製造法
JPS62212264A (ja) 高密度炭化けい素焼結体の製造方法
JPH0798333B2 (ja) 異方性炭素製品のバインダーレス成形方法