JPS622472B2 - - Google Patents

Info

Publication number
JPS622472B2
JPS622472B2 JP56117294A JP11729481A JPS622472B2 JP S622472 B2 JPS622472 B2 JP S622472B2 JP 56117294 A JP56117294 A JP 56117294A JP 11729481 A JP11729481 A JP 11729481A JP S622472 B2 JPS622472 B2 JP S622472B2
Authority
JP
Japan
Prior art keywords
arf
film
semiconductor
present
semiconductor layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56117294A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5818976A (ja
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP56117294A priority Critical patent/JPS5818976A/ja
Publication of JPS5818976A publication Critical patent/JPS5818976A/ja
Publication of JPS622472B2 publication Critical patent/JPS622472B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/30—Coatings
    • H10F77/306—Coatings for devices having potential barriers

Landscapes

  • Photovoltaic Devices (AREA)
JP56117294A 1981-07-27 1981-07-27 光電変換装置作製方法 Granted JPS5818976A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56117294A JPS5818976A (ja) 1981-07-27 1981-07-27 光電変換装置作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56117294A JPS5818976A (ja) 1981-07-27 1981-07-27 光電変換装置作製方法

Publications (2)

Publication Number Publication Date
JPS5818976A JPS5818976A (ja) 1983-02-03
JPS622472B2 true JPS622472B2 (enrdf_load_stackoverflow) 1987-01-20

Family

ID=14708187

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56117294A Granted JPS5818976A (ja) 1981-07-27 1981-07-27 光電変換装置作製方法

Country Status (1)

Country Link
JP (1) JPS5818976A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014505357A (ja) * 2010-12-14 2014-02-27 イノヴァライト インコーポレイテッド 高忠実度ドーピングペーストおよびその方法
JP2014522564A (ja) * 2011-05-03 2014-09-04 イノヴァライト インコーポレイテッド セラミックのホウ素含有ドーピングペーストおよびそのための方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3340874A1 (de) * 1983-11-11 1985-05-23 Telefunken electronic GmbH, 7100 Heilbronn Verfahren zum herstellen einer solarzelle
US7586108B2 (en) * 2007-06-25 2009-09-08 Asml Netherlands B.V. Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector
US8138485B2 (en) 2007-06-25 2012-03-20 Asml Netherlands B.V. Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector
KR101000067B1 (ko) * 2008-12-30 2010-12-10 엘지전자 주식회사 고효율 태양전지용 레이저 소성장치 및 고효율 태양전지 제조방법
JP6030587B2 (ja) 2014-01-31 2016-11-24 信越化学工業株式会社 太陽電池セルの製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014505357A (ja) * 2010-12-14 2014-02-27 イノヴァライト インコーポレイテッド 高忠実度ドーピングペーストおよびその方法
JP2014522564A (ja) * 2011-05-03 2014-09-04 イノヴァライト インコーポレイテッド セラミックのホウ素含有ドーピングペーストおよびそのための方法

Also Published As

Publication number Publication date
JPS5818976A (ja) 1983-02-03

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