JPS6224504B2 - - Google Patents
Info
- Publication number
- JPS6224504B2 JPS6224504B2 JP59069248A JP6924884A JPS6224504B2 JP S6224504 B2 JPS6224504 B2 JP S6224504B2 JP 59069248 A JP59069248 A JP 59069248A JP 6924884 A JP6924884 A JP 6924884A JP S6224504 B2 JPS6224504 B2 JP S6224504B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- metal
- coating
- heating
- annealing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0209—Pretreatment of the material to be coated by heating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6924884A JPS60215763A (ja) | 1984-04-09 | 1984-04-09 | 被膜形成方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6924884A JPS60215763A (ja) | 1984-04-09 | 1984-04-09 | 被膜形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60215763A JPS60215763A (ja) | 1985-10-29 |
JPS6224504B2 true JPS6224504B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-05-28 |
Family
ID=13397249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6924884A Granted JPS60215763A (ja) | 1984-04-09 | 1984-04-09 | 被膜形成方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60215763A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02190003A (ja) * | 1989-01-19 | 1990-07-26 | Fujitsu Ltd | 位相反転器 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5385741A (en) * | 1977-01-07 | 1978-07-28 | Nippon Steel Corp | Continuous evaporation plating method of steel band |
JPS5481114A (en) * | 1977-12-13 | 1979-06-28 | Kawasaki Steel Co | Cold rolled steel plate having provisional rust preventing and coating property |
JPS54160568A (en) * | 1978-06-09 | 1979-12-19 | Anelva Corp | Thin film forming equipment for discharge chemical reaction |
JPS5514854A (en) * | 1978-07-17 | 1980-02-01 | Nippon Steel Corp | Preparation of cold rolled sheet treated by phosphoric acid salt |
JPS5565326A (en) * | 1978-11-06 | 1980-05-16 | Kawasaki Steel Corp | Cold rolled steel sheet excellent in painting property and temporary rust preventive property |
JPS5629748A (en) * | 1979-08-20 | 1981-03-25 | Nec Corp | Microprogram control device |
-
1984
- 1984-04-09 JP JP6924884A patent/JPS60215763A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02190003A (ja) * | 1989-01-19 | 1990-07-26 | Fujitsu Ltd | 位相反転器 |
Also Published As
Publication number | Publication date |
---|---|
JPS60215763A (ja) | 1985-10-29 |