JPS62235724A - Ｍｏｃｖｄ装置 - Google Patents

Ｍｏｃｖｄ装置

Info

Publication number
JPS62235724A
JPS62235724A JP7876586A JP7876586A JPS62235724A JP S62235724 A JPS62235724 A JP S62235724A JP 7876586 A JP7876586 A JP 7876586A JP 7876586 A JP7876586 A JP 7876586A JP S62235724 A JPS62235724 A JP S62235724A
Authority
JP
Japan
Prior art keywords
susceptor
reaction tube
rotating shaft
vertical direction
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7876586A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0587015B2 (enrdf_load_stackoverflow
Inventor
Toshio Tanaka
利夫 田中
Ichiro Kume
久米　一郎
Aiichiro Nara
奈良　愛一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7876586A priority Critical patent/JPS62235724A/ja
Publication of JPS62235724A publication Critical patent/JPS62235724A/ja
Publication of JPH0587015B2 publication Critical patent/JPH0587015B2/ja
Granted legal-status Critical Current

Links

JP7876586A 1986-04-04 1986-04-04 Ｍｏｃｖｄ装置 Granted JPS62235724A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7876586A JPS62235724A (ja) 1986-04-04 1986-04-04 Ｍｏｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7876586A JPS62235724A (ja) 1986-04-04 1986-04-04 Ｍｏｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS62235724A true JPS62235724A (ja) 1987-10-15
JPH0587015B2 JPH0587015B2 (enrdf_load_stackoverflow) 1993-12-15

Family

ID=13670997

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7876586A Granted JPS62235724A (ja) 1986-04-04 1986-04-04 Ｍｏｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPS62235724A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5002011A (en) * 1987-04-14 1991-03-26 Kabushiki Kaisha Toshiba Vapor deposition apparatus
JPH0467619A (ja) * 1990-07-09 1992-03-03 Nec Kyushu Ltd 半導体製造装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5296865A (en) * 1976-02-04 1977-08-15 Nec Corp Crystal grown unit for chemical compound semiconductor
JPS58148424A (ja) * 1982-02-26 1983-09-03 Sony Corp 気相成長法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5296865A (en) * 1976-02-04 1977-08-15 Nec Corp Crystal grown unit for chemical compound semiconductor
JPS58148424A (ja) * 1982-02-26 1983-09-03 Sony Corp 気相成長法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5002011A (en) * 1987-04-14 1991-03-26 Kabushiki Kaisha Toshiba Vapor deposition apparatus
JPH0467619A (ja) * 1990-07-09 1992-03-03 Nec Kyushu Ltd 半導体製造装置

Also Published As

Publication number Publication date
JPH0587015B2 (enrdf_load_stackoverflow) 1993-12-15

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