JPS62225941A - 半導体バイオセンサ酵素固定化膜の形成方法 - Google Patents
半導体バイオセンサ酵素固定化膜の形成方法Info
- Publication number
- JPS62225941A JPS62225941A JP61070149A JP7014986A JPS62225941A JP S62225941 A JPS62225941 A JP S62225941A JP 61070149 A JP61070149 A JP 61070149A JP 7014986 A JP7014986 A JP 7014986A JP S62225941 A JPS62225941 A JP S62225941A
- Authority
- JP
- Japan
- Prior art keywords
- enzyme
- immobilized
- semiconductor
- film
- membrane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 46
- 239000012528 membrane Substances 0.000 title claims abstract description 35
- 108090000790 Enzymes Proteins 0.000 title claims abstract description 24
- 102000004190 Enzymes Human genes 0.000 title claims abstract description 24
- 238000000034 method Methods 0.000 title claims description 24
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 18
- 239000007864 aqueous solution Substances 0.000 claims abstract description 10
- 239000012460 protein solution Substances 0.000 claims abstract description 8
- 239000003431 cross linking reagent Substances 0.000 claims abstract description 7
- 238000004528 spin coating Methods 0.000 claims abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 3
- 230000005669 field effect Effects 0.000 claims description 13
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 238000000206 photolithography Methods 0.000 claims description 3
- 238000009210 therapy by ultrasound Methods 0.000 claims description 2
- 230000003100 immobilizing effect Effects 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 9
- 229910052710 silicon Inorganic materials 0.000 abstract description 9
- 239000010703 silicon Substances 0.000 abstract description 9
- 229910052594 sapphire Inorganic materials 0.000 abstract description 8
- 239000010980 sapphire Substances 0.000 abstract description 8
- 239000000758 substrate Substances 0.000 abstract description 8
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract description 5
- 239000010931 gold Substances 0.000 abstract description 5
- 229910052737 gold Inorganic materials 0.000 abstract description 5
- WYTZZXDRDKSJID-UHFFFAOYSA-N (3-aminopropyl)triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCCN WYTZZXDRDKSJID-UHFFFAOYSA-N 0.000 abstract description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 2
- 229910052760 oxygen Inorganic materials 0.000 abstract 2
- 239000001301 oxygen Substances 0.000 abstract 2
- 229940088598 enzyme Drugs 0.000 description 17
- 150000002500 ions Chemical class 0.000 description 8
- 239000000126 substance Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- SXRSQZLOMIGNAQ-UHFFFAOYSA-N Glutaraldehyde Chemical compound O=CCCCC=O SXRSQZLOMIGNAQ-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 125000003172 aldehyde group Chemical group 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000004132 cross linking Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- IHPYMWDTONKSCO-UHFFFAOYSA-N 2,2'-piperazine-1,4-diylbisethanesulfonic acid Chemical compound OS(=O)(=O)CCN1CCN(CCS(O)(=O)=O)CC1 IHPYMWDTONKSCO-UHFFFAOYSA-N 0.000 description 1
- 108091003079 Bovine Serum Albumin Proteins 0.000 description 1
- 229920002284 Cellulose triacetate Polymers 0.000 description 1
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 1
- 108010015776 Glucose oxidase Proteins 0.000 description 1
- 239000004366 Glucose oxidase Substances 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical group [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 1
- 108010046334 Urease Proteins 0.000 description 1
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 229940098773 bovine serum albumin Drugs 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 239000004202 carbamide Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000002255 enzymatic effect Effects 0.000 description 1
- CCIVGXIOQKPBKL-UHFFFAOYSA-N ethanesulfonic acid Chemical compound CCS(O)(=O)=O CCIVGXIOQKPBKL-UHFFFAOYSA-N 0.000 description 1
- 239000008103 glucose Substances 0.000 description 1
- 229940116332 glucose oxidase Drugs 0.000 description 1
- 235000019420 glucose oxidase Nutrition 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N hydrochloric acid Substances Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000002525 ultrasonication Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Immobilizing And Processing Of Enzymes And Microorganisms (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61070149A JPS62225941A (ja) | 1986-03-27 | 1986-03-27 | 半導体バイオセンサ酵素固定化膜の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61070149A JPS62225941A (ja) | 1986-03-27 | 1986-03-27 | 半導体バイオセンサ酵素固定化膜の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62225941A true JPS62225941A (ja) | 1987-10-03 |
| JPH0481739B2 JPH0481739B2 (enrdf_load_stackoverflow) | 1992-12-24 |
Family
ID=13423228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61070149A Granted JPS62225941A (ja) | 1986-03-27 | 1986-03-27 | 半導体バイオセンサ酵素固定化膜の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62225941A (enrdf_load_stackoverflow) |
-
1986
- 1986-03-27 JP JP61070149A patent/JPS62225941A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0481739B2 (enrdf_load_stackoverflow) | 1992-12-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Nakamoto et al. | A lift-off method for patterning enzyme-immobilized membranes in multi-biosensors | |
| US4894339A (en) | Immobilized enzyme membrane for a semiconductor sensor | |
| US5955335A (en) | Biomaterial immobilization on an Si3 N4 surface containing Si-NH2 groups with a heterobifunctional cross-linking agent | |
| JP3105919B2 (ja) | 完全マイクロ加工バイオセンサー、その製造方法およびその使用 | |
| US5445920A (en) | Fabrication process of biosensor | |
| JPS61165656A (ja) | 固定化酵素薄膜の形成法 | |
| JPH0548418B2 (enrdf_load_stackoverflow) | ||
| JPH0349388B2 (enrdf_load_stackoverflow) | ||
| US5356757A (en) | Immobilized enzyme film, protein immobilized film and process for forming the same | |
| JPS62225941A (ja) | 半導体バイオセンサ酵素固定化膜の形成方法 | |
| JPH0481740B2 (enrdf_load_stackoverflow) | ||
| JPS6366454A (ja) | 酵素センサ−およびその製造方法 | |
| JP2946913B2 (ja) | 固定化酵素膜およびタンパク質固定化膜の製造方法 | |
| JPS61274682A (ja) | 酵素固定化膜の製造法 | |
| Jaffrezic-Renault et al. | Semiconductor-based micro-biosensors | |
| CN1166874A (zh) | 带有以共价键固定在信号活性表面上的生物物质的生物传感器 | |
| JPH0519654B2 (enrdf_load_stackoverflow) | ||
| JPS63241346A (ja) | プレ−ナ型バイオセンサの製造方法 | |
| JPS61283862A (ja) | 酵素固定化膜の製造方法 | |
| JPS61234349A (ja) | 半導体マルチバイオセンサの製造方法 | |
| JP2604857B2 (ja) | 酵素電極 | |
| JPS6188136A (ja) | 半導体マルチバイオセンサの製造方法 | |
| JP2687942B2 (ja) | 固定化酵素膜の形成方法 | |
| JPH069699A (ja) | タンパク質の固定方法 | |
| Shiono et al. | Advances in enzymatically coupled field effect transistors |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |