JPH0481740B2 - - Google Patents

Info

Publication number

JPH0481740B2

JPH0481740B2 JP61070150A JP7015086A JPH0481740B2 JP H0481740 B2 JPH0481740 B2 JP H0481740B2 JP 61070150 A JP61070150 A JP 61070150A JP 7015086 A JP7015086 A JP 7015086A JP H0481740 B2 JPH0481740 B2 JP H0481740B2

Authority

JP

Japan

Prior art keywords

enzyme

immobilized

film

photoresist

isfet

Prior art date

1986-03-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired - Lifetime

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• 229920002120 photoresistant polymer Polymers 0.000 claims description 34
• 239000012528 membrane Substances 0.000 claims description 28
• 239000004065 semiconductor Substances 0.000 claims description 28
• 238000000034 method Methods 0.000 claims description 22
• 230000005669 field effect Effects 0.000 claims description 12
• 150000002500 ions Chemical class 0.000 description 10
• 108090000790 Enzymes Proteins 0.000 description 9
• 102000004190 Enzymes Human genes 0.000 description 9
• 229940088598 enzyme Drugs 0.000 description 9
• CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical group CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
• 229910052710 silicon Inorganic materials 0.000 description 6
• 239000010703 silicon Substances 0.000 description 6
• 239000000758 substrate Substances 0.000 description 6
• 238000004519 manufacturing process Methods 0.000 description 5
• 239000003960 organic solvent Substances 0.000 description 5
• 229910052594 sapphire Inorganic materials 0.000 description 5
• 239000010980 sapphire Substances 0.000 description 5
• 239000007864 aqueous solution Substances 0.000 description 4
• 239000003431 cross linking reagent Substances 0.000 description 4
• PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
• 239000010931 gold Substances 0.000 description 4
• 229910052737 gold Inorganic materials 0.000 description 4
• 238000000206 photolithography Methods 0.000 description 4
• SXRSQZLOMIGNAQ-UHFFFAOYSA-N Glutaraldehyde Chemical compound O=CCCCC=O SXRSQZLOMIGNAQ-UHFFFAOYSA-N 0.000 description 3
• 238000006243 chemical reaction Methods 0.000 description 3
• 239000012460 protein solution Substances 0.000 description 3
• 239000000243 solution Substances 0.000 description 3
• 239000000126 substance Substances 0.000 description 3
• WYTZZXDRDKSJID-UHFFFAOYSA-N (3-aminopropyl)triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCCN WYTZZXDRDKSJID-UHFFFAOYSA-N 0.000 description 2
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
• XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 2
• UMVBXBACMIOFDO-UHFFFAOYSA-N [N].[Si] Chemical compound [N].[Si] UMVBXBACMIOFDO-UHFFFAOYSA-N 0.000 description 2
• 239000004202 carbamide Substances 0.000 description 2
• 238000007796 conventional method Methods 0.000 description 2
• 238000004132 cross linking Methods 0.000 description 2
• 238000001514 detection method Methods 0.000 description 2
• 230000000694 effects Effects 0.000 description 2
• 239000012535 impurity Substances 0.000 description 2
• 239000000463 material Substances 0.000 description 2
• 230000002093 peripheral effect Effects 0.000 description 2
• 229910052814 silicon oxide Inorganic materials 0.000 description 2
• HEMHJVSKTPXQMS-UHFFFAOYSA-M sodium hydroxide Inorganic materials [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 2
• 239000007787 solid Substances 0.000 description 2
• 238000004528 spin coating Methods 0.000 description 2
• 108091003079 Bovine Serum Albumin Proteins 0.000 description 1
• 229920002284 Cellulose triacetate Polymers 0.000 description 1
• WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 1
• 108010015776 Glucose oxidase Proteins 0.000 description 1
• 239000004366 Glucose oxidase Substances 0.000 description 1
• 108010046334 Urease Proteins 0.000 description 1
• NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
• 230000015572 biosynthetic process Effects 0.000 description 1
• 229940098773 bovine serum albumin Drugs 0.000 description 1
• 230000003197 catalytic effect Effects 0.000 description 1
• 239000011248 coating agent Substances 0.000 description 1
• 238000000576 coating method Methods 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 230000005684 electric field Effects 0.000 description 1
• CCIVGXIOQKPBKL-UHFFFAOYSA-N ethanesulfonic acid Chemical compound CCS(O)(=O)=O CCIVGXIOQKPBKL-UHFFFAOYSA-N 0.000 description 1
• MUJOIMFVNIBMKC-UHFFFAOYSA-N fludioxonil Chemical compound C=12OC(F)(F)OC2=CC=CC=1C1=CNC=C1C#N MUJOIMFVNIBMKC-UHFFFAOYSA-N 0.000 description 1
• 239000008103 glucose Substances 0.000 description 1
• 229940116332 glucose oxidase Drugs 0.000 description 1
• 235000019420 glucose oxidase Nutrition 0.000 description 1
• GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 1
• 238000005259 measurement Methods 0.000 description 1
• 239000011259 mixed solution Substances 0.000 description 1
• 229910052757 nitrogen Inorganic materials 0.000 description 1
• 239000001301 oxygen Substances 0.000 description 1
• 229910052760 oxygen Inorganic materials 0.000 description 1
• 238000009210 therapy by ultrasound Methods 0.000 description 1
• 230000008719 thickening Effects 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1