JPS62219611A - エツチング装置 - Google Patents
エツチング装置Info
- Publication number
- JPS62219611A JPS62219611A JP61062399A JP6239986A JPS62219611A JP S62219611 A JPS62219611 A JP S62219611A JP 61062399 A JP61062399 A JP 61062399A JP 6239986 A JP6239986 A JP 6239986A JP S62219611 A JPS62219611 A JP S62219611A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- carbon electrodes
- aluminum foil
- current
- current density
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 claims description 45
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 30
- 239000011888 foil Substances 0.000 claims description 25
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 23
- 229910052782 aluminium Inorganic materials 0.000 claims description 23
- 239000008151 electrolyte solution Substances 0.000 claims description 5
- 239000003792 electrolyte Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- 239000003990 capacitor Substances 0.000 description 6
- 238000007788 roughening Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- FLDCSPABIQBYKP-UHFFFAOYSA-N 5-chloro-1,2-dimethylbenzimidazole Chemical compound ClC1=CC=C2N(C)C(C)=NC2=C1 FLDCSPABIQBYKP-UHFFFAOYSA-N 0.000 description 1
- 239000001741 Ammonium adipate Substances 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 1
- 235000019293 ammonium adipate Nutrition 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 235000011149 sulphuric acid Nutrition 0.000 description 1
Landscapes
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61062399A JPS62219611A (ja) | 1986-03-20 | 1986-03-20 | エツチング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61062399A JPS62219611A (ja) | 1986-03-20 | 1986-03-20 | エツチング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62219611A true JPS62219611A (ja) | 1987-09-26 |
| JPH0240758B2 JPH0240758B2 (enrdf_load_stackoverflow) | 1990-09-13 |
Family
ID=13199018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61062399A Granted JPS62219611A (ja) | 1986-03-20 | 1986-03-20 | エツチング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62219611A (enrdf_load_stackoverflow) |
-
1986
- 1986-03-20 JP JP61062399A patent/JPS62219611A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0240758B2 (enrdf_load_stackoverflow) | 1990-09-13 |
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