JPS62218558A - 化合物薄膜蒸着装置 - Google Patents

化合物薄膜蒸着装置

Info

Publication number
JPS62218558A
JPS62218558A JP6145886A JP6145886A JPS62218558A JP S62218558 A JPS62218558 A JP S62218558A JP 6145886 A JP6145886 A JP 6145886A JP 6145886 A JP6145886 A JP 6145886A JP S62218558 A JPS62218558 A JP S62218558A
Authority
JP
Japan
Prior art keywords
crucible
vacuum
thin film
filament
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6145886A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0535218B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Hiromoto Ito
弘基 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6145886A priority Critical patent/JPS62218558A/ja
Publication of JPS62218558A publication Critical patent/JPS62218558A/ja
Publication of JPH0535218B2 publication Critical patent/JPH0535218B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6145886A 1986-03-17 1986-03-17 化合物薄膜蒸着装置 Granted JPS62218558A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6145886A JPS62218558A (ja) 1986-03-17 1986-03-17 化合物薄膜蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6145886A JPS62218558A (ja) 1986-03-17 1986-03-17 化合物薄膜蒸着装置

Publications (2)

Publication Number Publication Date
JPS62218558A true JPS62218558A (ja) 1987-09-25
JPH0535218B2 JPH0535218B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-05-26

Family

ID=13171610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6145886A Granted JPS62218558A (ja) 1986-03-17 1986-03-17 化合物薄膜蒸着装置

Country Status (1)

Country Link
JP (1) JPS62218558A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100665951B1 (ko) * 2004-02-23 2007-01-10 엘지전자 주식회사 유기 전계 발광 소자의 증착원

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100665951B1 (ko) * 2004-02-23 2007-01-10 엘지전자 주식회사 유기 전계 발광 소자의 증착원

Also Published As

Publication number Publication date
JPH0535218B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-05-26

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