JPS62216243A - ウエ−ハ押し出し装置 - Google Patents

ウエ−ハ押し出し装置

Info

Publication number
JPS62216243A
JPS62216243A JP5862786A JP5862786A JPS62216243A JP S62216243 A JPS62216243 A JP S62216243A JP 5862786 A JP5862786 A JP 5862786A JP 5862786 A JP5862786 A JP 5862786A JP S62216243 A JPS62216243 A JP S62216243A
Authority
JP
Japan
Prior art keywords
wafer
extrusion
extruding
cassette
extruding member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5862786A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0558571B2 (enExample
Inventor
Tsutomu Mizumura
勉 水村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to JP5862786A priority Critical patent/JPS62216243A/ja
Publication of JPS62216243A publication Critical patent/JPS62216243A/ja
Publication of JPH0558571B2 publication Critical patent/JPH0558571B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
JP5862786A 1986-03-17 1986-03-17 ウエ−ハ押し出し装置 Granted JPS62216243A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5862786A JPS62216243A (ja) 1986-03-17 1986-03-17 ウエ−ハ押し出し装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5862786A JPS62216243A (ja) 1986-03-17 1986-03-17 ウエ−ハ押し出し装置

Publications (2)

Publication Number Publication Date
JPS62216243A true JPS62216243A (ja) 1987-09-22
JPH0558571B2 JPH0558571B2 (enExample) 1993-08-26

Family

ID=13089816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5862786A Granted JPS62216243A (ja) 1986-03-17 1986-03-17 ウエ−ハ押し出し装置

Country Status (1)

Country Link
JP (1) JPS62216243A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4941800A (en) * 1988-10-21 1990-07-17 Tokyo Electron Limited Transfer apparatus for plate-like member
JPH03102534U (enExample) * 1990-02-06 1991-10-24
JP2011011836A (ja) * 2009-06-30 2011-01-20 Teraoka Seiko Co Ltd 商品供給装置及び該装置を備えた包装装置
JP2014008567A (ja) * 2012-06-29 2014-01-20 Musashi Eng Co Ltd ワーク押出装置およびそれを備えるワーク供給装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6136943A (ja) * 1984-07-30 1986-02-21 Hitachi Ltd 試料搬送装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6136943A (ja) * 1984-07-30 1986-02-21 Hitachi Ltd 試料搬送装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4941800A (en) * 1988-10-21 1990-07-17 Tokyo Electron Limited Transfer apparatus for plate-like member
JPH03102534U (enExample) * 1990-02-06 1991-10-24
JP2011011836A (ja) * 2009-06-30 2011-01-20 Teraoka Seiko Co Ltd 商品供給装置及び該装置を備えた包装装置
JP2014008567A (ja) * 2012-06-29 2014-01-20 Musashi Eng Co Ltd ワーク押出装置およびそれを備えるワーク供給装置

Also Published As

Publication number Publication date
JPH0558571B2 (enExample) 1993-08-26

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