JPS6221005Y2 - - Google Patents

Info

Publication number
JPS6221005Y2
JPS6221005Y2 JP1980182987U JP18298780U JPS6221005Y2 JP S6221005 Y2 JPS6221005 Y2 JP S6221005Y2 JP 1980182987 U JP1980182987 U JP 1980182987U JP 18298780 U JP18298780 U JP 18298780U JP S6221005 Y2 JPS6221005 Y2 JP S6221005Y2
Authority
JP
Japan
Prior art keywords
connecting rod
quartz
tube
reaction tube
paddle connecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980182987U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57104524U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980182987U priority Critical patent/JPS6221005Y2/ja
Publication of JPS57104524U publication Critical patent/JPS57104524U/ja
Application granted granted Critical
Publication of JPS6221005Y2 publication Critical patent/JPS6221005Y2/ja
Expired legal-status Critical Current

Links

JP1980182987U 1980-12-19 1980-12-19 Expired JPS6221005Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980182987U JPS6221005Y2 (cs) 1980-12-19 1980-12-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980182987U JPS6221005Y2 (cs) 1980-12-19 1980-12-19

Publications (2)

Publication Number Publication Date
JPS57104524U JPS57104524U (cs) 1982-06-28
JPS6221005Y2 true JPS6221005Y2 (cs) 1987-05-28

Family

ID=29981842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980182987U Expired JPS6221005Y2 (cs) 1980-12-19 1980-12-19

Country Status (1)

Country Link
JP (1) JPS6221005Y2 (cs)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5539630A (en) * 1978-09-13 1980-03-19 Fujitsu Ltd Vapor phase growth device

Also Published As

Publication number Publication date
JPS57104524U (cs) 1982-06-28

Similar Documents

Publication Publication Date Title
CN106449487A (zh) 一种半导体设备的处理腔室的控氧控压系统
JPH07326588A (ja) 基板の熱処理装置
JPS6221005Y2 (cs)
JPS6366927A (ja) 熱処理装置
JP4818589B2 (ja) 処理装置
GB1330961A (en) Catalytic converter
JPH085549Y2 (ja) 高品質酸化用外部燃焼ユニット
CA1277442C (en) Gas scavenger
JPH01293120A (ja) 廃ガス処理方法
JPH0572132U (ja) 半導体製造装置
JPS6430234A (en) Apparatus for manufacturing semiconductor device
JPS6135559Y2 (cs)
JPS561527A (en) Exhaust gas disposal method for semiconductor manufacturing equipment
JP2751666B2 (ja) 半導体ウェハース熱酸化拡散システム
JPH03194933A (ja) 処理装置
JPH04361527A (ja) 半導体熱処理用治具の表面処理方法および使用方法
JPS60138912A (ja) 熱処理炉
JPH04119276A (ja) 真空バルブ
JPS6310549U (cs)
JPS638127Y2 (cs)
JPH0577751U (ja) ガスサンプリング装置
JPS6122454B2 (cs)
JP2771252B2 (ja) マスフローコントローラ
JPS58202543A (ja) 半導体基板の位置決め機構
JPH0332022A (ja) 有機物除去装置