JPS6221001Y2 - - Google Patents

Info

Publication number
JPS6221001Y2
JPS6221001Y2 JP1981188486U JP18848681U JPS6221001Y2 JP S6221001 Y2 JPS6221001 Y2 JP S6221001Y2 JP 1981188486 U JP1981188486 U JP 1981188486U JP 18848681 U JP18848681 U JP 18848681U JP S6221001 Y2 JPS6221001 Y2 JP S6221001Y2
Authority
JP
Japan
Prior art keywords
quartz
sic
rod
pipe
motherboard
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981188486U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5892729U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18848681U priority Critical patent/JPS5892729U/ja
Publication of JPS5892729U publication Critical patent/JPS5892729U/ja
Application granted granted Critical
Publication of JPS6221001Y2 publication Critical patent/JPS6221001Y2/ja
Granted legal-status Critical Current

Links

JP18848681U 1981-12-17 1981-12-17 半導体製造装置 Granted JPS5892729U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18848681U JPS5892729U (ja) 1981-12-17 1981-12-17 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18848681U JPS5892729U (ja) 1981-12-17 1981-12-17 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS5892729U JPS5892729U (ja) 1983-06-23
JPS6221001Y2 true JPS6221001Y2 (enrdf_load_stackoverflow) 1987-05-28

Family

ID=29992095

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18848681U Granted JPS5892729U (ja) 1981-12-17 1981-12-17 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS5892729U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2676405B2 (ja) * 1989-04-25 1997-11-17 信越石英株式会社 半導体製造装置若しくは治具用石英ガラス及びその製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS543647Y2 (enrdf_load_stackoverflow) * 1975-07-21 1979-02-20
JPS52145771U (enrdf_load_stackoverflow) * 1976-04-27 1977-11-04
JPS5699851U (enrdf_load_stackoverflow) * 1979-12-27 1981-08-06

Also Published As

Publication number Publication date
JPS5892729U (ja) 1983-06-23

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