JPS5892729U - 半導体製造装置 - Google Patents

半導体製造装置

Info

Publication number
JPS5892729U
JPS5892729U JP18848681U JP18848681U JPS5892729U JP S5892729 U JPS5892729 U JP S5892729U JP 18848681 U JP18848681 U JP 18848681U JP 18848681 U JP18848681 U JP 18848681U JP S5892729 U JPS5892729 U JP S5892729U
Authority
JP
Japan
Prior art keywords
semiconductor manufacturing
manufacturing equipment
motherboard
quartz
reactor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18848681U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6221001Y2 (enrdf_load_stackoverflow
Inventor
邦夫 佐々木
Original Assignee
山形日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 山形日本電気株式会社 filed Critical 山形日本電気株式会社
Priority to JP18848681U priority Critical patent/JPS5892729U/ja
Publication of JPS5892729U publication Critical patent/JPS5892729U/ja
Application granted granted Critical
Publication of JPS6221001Y2 publication Critical patent/JPS6221001Y2/ja
Granted legal-status Critical Current

Links

JP18848681U 1981-12-17 1981-12-17 半導体製造装置 Granted JPS5892729U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18848681U JPS5892729U (ja) 1981-12-17 1981-12-17 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18848681U JPS5892729U (ja) 1981-12-17 1981-12-17 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS5892729U true JPS5892729U (ja) 1983-06-23
JPS6221001Y2 JPS6221001Y2 (enrdf_load_stackoverflow) 1987-05-28

Family

ID=29992095

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18848681U Granted JPS5892729U (ja) 1981-12-17 1981-12-17 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS5892729U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02283015A (ja) * 1989-04-25 1990-11-20 Shinetsu Sekiei Kk 半導体製造装置若しくは治具用石英ガラス及びその製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5215168U (enrdf_load_stackoverflow) * 1975-07-21 1977-02-02
JPS52145771U (enrdf_load_stackoverflow) * 1976-04-27 1977-11-04
JPS5699851U (enrdf_load_stackoverflow) * 1979-12-27 1981-08-06

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5215168U (enrdf_load_stackoverflow) * 1975-07-21 1977-02-02
JPS52145771U (enrdf_load_stackoverflow) * 1976-04-27 1977-11-04
JPS5699851U (enrdf_load_stackoverflow) * 1979-12-27 1981-08-06

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02283015A (ja) * 1989-04-25 1990-11-20 Shinetsu Sekiei Kk 半導体製造装置若しくは治具用石英ガラス及びその製造方法

Also Published As

Publication number Publication date
JPS6221001Y2 (enrdf_load_stackoverflow) 1987-05-28

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