JPS6220733B2 - - Google Patents

Info

Publication number
JPS6220733B2
JPS6220733B2 JP52030652A JP3065277A JPS6220733B2 JP S6220733 B2 JPS6220733 B2 JP S6220733B2 JP 52030652 A JP52030652 A JP 52030652A JP 3065277 A JP3065277 A JP 3065277A JP S6220733 B2 JPS6220733 B2 JP S6220733B2
Authority
JP
Japan
Prior art keywords
acoustic wave
surface acoustic
trimming
frequency
wave element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52030652A
Other languages
English (en)
Japanese (ja)
Other versions
JPS53116094A (en
Inventor
Yasuo Ehata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP3065277A priority Critical patent/JPS53116094A/ja
Publication of JPS53116094A publication Critical patent/JPS53116094A/ja
Publication of JPS6220733B2 publication Critical patent/JPS6220733B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP3065277A 1977-03-19 1977-03-19 Trimming method for elastic surface wave element Granted JPS53116094A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3065277A JPS53116094A (en) 1977-03-19 1977-03-19 Trimming method for elastic surface wave element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3065277A JPS53116094A (en) 1977-03-19 1977-03-19 Trimming method for elastic surface wave element

Publications (2)

Publication Number Publication Date
JPS53116094A JPS53116094A (en) 1978-10-11
JPS6220733B2 true JPS6220733B2 (enrdf_load_stackoverflow) 1987-05-08

Family

ID=12309716

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3065277A Granted JPS53116094A (en) 1977-03-19 1977-03-19 Trimming method for elastic surface wave element

Country Status (1)

Country Link
JP (1) JPS53116094A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS616913A (ja) * 1984-06-20 1986-01-13 Fujitsu Ltd 弾性波素子の周波数調整方法
JP2602215B2 (ja) * 1986-12-15 1997-04-23 日本電波工業 株式会社 圧電振動子の周波数調整方法
JP2533633Y2 (ja) * 1987-03-06 1997-04-23 日本電波工業 株式会社 Ａｔカット水晶振動子
JP3157433B2 (ja) * 1994-09-30 2001-04-16 トッキ株式会社 周波数調整装置
JP3336780B2 (ja) * 1994-11-16 2002-10-21 株式会社村田製作所 振動子の共振周波数調整方法およびその装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5840849B2 (ja) * 1976-02-18 1983-09-08 日本電気株式会社 弾性表面波変換器の周波数調整法

Also Published As

Publication number Publication date
JPS53116094A (en) 1978-10-11

Similar Documents

Publication Publication Date Title
US5630949A (en) Method and apparatus for fabricating a piezoelectric resonator to a resonant frequency
US20200380066A1 (en) Data processing method, data processing apparatus and processing apparatus
KR100302969B1 (ko) 탄성표면파장치의제조방법
CN102377402A (zh) 压电振动设备及其制造方法、谐振频率的调整方法
US20120181899A1 (en) Piezoelectric resonator and elastic wave device
Faizan et al. Optimization of inactive regions of lithium niobate shear mode resonator for quality factor enhancement
JPS6220733B2 (enrdf_load_stackoverflow)
US5085080A (en) Temperature and pressure measuring technique using the photoacoustic effect and mechanical resonance
KR102035143B1 (ko) 막 두께 제어 장치, 막 두께 제어 방법 및 성막 장치
US20050043906A1 (en) Method and device for determining the acoustic parameters of fluids in a resonator device
JPH03804B2 (enrdf_load_stackoverflow)
JP2008078869A (ja) 振動子の製造方法
JP2007267288A (ja) 音叉型水晶振動子の製造方法、および水晶振動デバイス
EP0471567B1 (en) Real-time, in-situ saw filter delay adjustment
JP3140767B2 (ja) 弾性表面波素子の製造方法
US4610894A (en) Method of manufacturing surface acoustic wave device
JP3351119B2 (ja) 圧電共振子の製造方法
JPH0145246B2 (enrdf_load_stackoverflow)
CN109194300B (zh) 一种高频声表面波沟槽栅阵色散延迟线相位偏差补偿方法
JP4817237B2 (ja) 圧電素子の周波数調整装置、及び周波数調整方法
EP4492003A1 (en) Vibration sensor and methods for deposition monitoring
JPS5829648B2 (ja) 音叉形水晶振動子の固有周波数調整方法
RU2247400C1 (ru) Устройство для измерения комплексной диэлектрической проницаемости низкоимпедансных материалов на свч
JP2014195198A (ja) 捩り振動子
JP2009038773A (ja) 弾性表面波デバイスの製造方法、弾性表面波デバイスおよび電子機器