JPS6219685B2 - - Google Patents

Info

Publication number
JPS6219685B2
JPS6219685B2 JP396179A JP396179A JPS6219685B2 JP S6219685 B2 JPS6219685 B2 JP S6219685B2 JP 396179 A JP396179 A JP 396179A JP 396179 A JP396179 A JP 396179A JP S6219685 B2 JPS6219685 B2 JP S6219685B2
Authority
JP
Japan
Prior art keywords
measured
periodic pattern
projection
signal
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP396179A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5596406A (en
Inventor
Yoshisada Oshida
Nobuyuki Akyama
Yasuo Nakagawa
Hiroshi Makihira
Yoshimasa Ooshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP396179A priority Critical patent/JPS5596406A/ja
Publication of JPS5596406A publication Critical patent/JPS5596406A/ja
Publication of JPS6219685B2 publication Critical patent/JPS6219685B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Automatic Focus Adjustment (AREA)
JP396179A 1979-01-19 1979-01-19 Device for determining roughness of surface Granted JPS5596406A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP396179A JPS5596406A (en) 1979-01-19 1979-01-19 Device for determining roughness of surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP396179A JPS5596406A (en) 1979-01-19 1979-01-19 Device for determining roughness of surface

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP25162786A Division JPS62115114A (ja) 1986-10-24 1986-10-24 自動合焦点制御装置

Publications (2)

Publication Number Publication Date
JPS5596406A JPS5596406A (en) 1980-07-22
JPS6219685B2 true JPS6219685B2 (enrdf_load_stackoverflow) 1987-04-30

Family

ID=11571681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP396179A Granted JPS5596406A (en) 1979-01-19 1979-01-19 Device for determining roughness of surface

Country Status (1)

Country Link
JP (1) JPS5596406A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000284182A (ja) * 1999-03-11 2000-10-13 Corning Inc 自動合焦システムのための合焦用フィラメント
JP2011047867A (ja) * 2009-08-28 2011-03-10 Nikon Corp スケール体、位置検出装置、ステージ装置、及び露光装置

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3119505A1 (de) * 1981-05-15 1983-01-27 Siemens AG, 1000 Berlin und 8000 München Optischer sensor fuer die erfassung von dreidimensionalen objekten
JPS5811803A (ja) * 1981-07-15 1983-01-22 Hitachi Ltd 膜厚測定方法およびその装置
JPS5875005A (ja) * 1981-10-30 1983-05-06 Hitachi Ltd 板厚測定方法および装置
JPS6118913A (ja) * 1984-07-06 1986-01-27 Kowa Co 自動焦点調整装置
JPS6199113A (ja) * 1984-10-22 1986-05-17 Toho Denshi Kogyo Kk 顕微鏡のピント合わせ方法
JP2527159B2 (ja) * 1984-12-11 1996-08-21 ミノルタ株式会社 焦点検出装置
JPH0610694B2 (ja) * 1985-04-12 1994-02-09 株式会社日立製作所 自動焦点合せ方法及び装置
US4743771A (en) * 1985-06-17 1988-05-10 View Engineering, Inc. Z-axis height measurement system
JPS627010U (enrdf_load_stackoverflow) * 1985-06-28 1987-01-16
JPS628437A (ja) * 1985-07-04 1987-01-16 Jeol Ltd 粒子線マイクロアナライザ−
JPH0697299B2 (ja) * 1986-03-25 1994-11-30 旭光学工業株式会社 焦点検出用補助投光装置
JPH0616402B2 (ja) * 1986-04-11 1994-03-02 日本電子株式会社 Ｘ線マイクロアナライザ−等に使用する光学顕微鏡の自動焦点合わせ装置
JPS63212911A (ja) * 1987-03-02 1988-09-05 Hitachi Electronics Eng Co Ltd オ−トフオ−カス方式
JPS63239412A (ja) * 1987-03-27 1988-10-05 Hitachi Electronics Eng Co Ltd オ−トフオ−カス方式
DE602005004332T2 (de) 2004-06-17 2009-01-08 Cadent Ltd. Verfahren zum Bereitstellen von Daten im Zusammenhang mit der Mundhöhle
JP2007155379A (ja) * 2005-12-01 2007-06-21 Tokyo Univ Of Agriculture & Technology 三次元形状計測装置および三次元形状計測方法
JP5397704B2 (ja) 2008-03-11 2014-01-22 株式会社ニコン 形状測定装置
JP2010026212A (ja) * 2008-07-18 2010-02-04 Mitsutoyo Corp オートフォーカス装置
US9675430B2 (en) 2014-08-15 2017-06-13 Align Technology, Inc. Confocal imaging apparatus with curved focal surface

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000284182A (ja) * 1999-03-11 2000-10-13 Corning Inc 自動合焦システムのための合焦用フィラメント
JP2011047867A (ja) * 2009-08-28 2011-03-10 Nikon Corp スケール体、位置検出装置、ステージ装置、及び露光装置

Also Published As

Publication number Publication date
JPS5596406A (en) 1980-07-22

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