JPS5596406A - Device for determining roughness of surface - Google Patents

Device for determining roughness of surface

Info

Publication number
JPS5596406A
JPS5596406A JP396179A JP396179A JPS5596406A JP S5596406 A JPS5596406 A JP S5596406A JP 396179 A JP396179 A JP 396179A JP 396179 A JP396179 A JP 396179A JP S5596406 A JPS5596406 A JP S5596406A
Authority
JP
Japan
Prior art keywords
image
pickup
pattern
stage
roughness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP396179A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6219685B2 (enrdf_load_stackoverflow
Inventor
Yoshisada Oshida
Nobuyuki Akiyama
Yasuo Nakagawa
Hiroshi Makihira
Yoshimasa Oshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP396179A priority Critical patent/JPS5596406A/ja
Publication of JPS5596406A publication Critical patent/JPS5596406A/ja
Publication of JPS6219685B2 publication Critical patent/JPS6219685B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Automatic Focus Adjustment (AREA)
JP396179A 1979-01-19 1979-01-19 Device for determining roughness of surface Granted JPS5596406A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP396179A JPS5596406A (en) 1979-01-19 1979-01-19 Device for determining roughness of surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP396179A JPS5596406A (en) 1979-01-19 1979-01-19 Device for determining roughness of surface

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP25162786A Division JPS62115114A (ja) 1986-10-24 1986-10-24 自動合焦点制御装置

Publications (2)

Publication Number Publication Date
JPS5596406A true JPS5596406A (en) 1980-07-22
JPS6219685B2 JPS6219685B2 (enrdf_load_stackoverflow) 1987-04-30

Family

ID=11571681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP396179A Granted JPS5596406A (en) 1979-01-19 1979-01-19 Device for determining roughness of surface

Country Status (1)

Country Link
JP (1) JPS5596406A (enrdf_load_stackoverflow)

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57207852A (en) * 1981-05-15 1982-12-20 Siemens Ag Method of detecting three-dimensional object
JPS5811803A (ja) * 1981-07-15 1983-01-22 Hitachi Ltd 膜厚測定方法およびその装置
JPS5875005A (ja) * 1981-10-30 1983-05-06 Hitachi Ltd 板厚測定方法および装置
JPS6118913A (ja) * 1984-07-06 1986-01-27 Kowa Co 自動焦点調整装置
JPS6199113A (ja) * 1984-10-22 1986-05-17 Toho Denshi Kogyo Kk 顕微鏡のピント合わせ方法
JPS61138222A (ja) * 1984-12-11 1986-06-25 Minolta Camera Co Ltd Ｔ．ｔ．ｌ焦点検出装置を有するカメラの照明装置
JPS61235808A (ja) * 1985-04-12 1986-10-21 Hitachi Ltd 自動焦点合せ方法及び装置
JPS622118A (ja) * 1985-06-17 1987-01-08 ヴイユウ　エンジニアリング　インコ−ポレイテツド Ｚ軸方向位置測定方法及び装置
JPS627010U (enrdf_load_stackoverflow) * 1985-06-28 1987-01-16
JPS628437A (ja) * 1985-07-04 1987-01-16 Jeol Ltd 粒子線マイクロアナライザ−
JPS62241246A (ja) * 1986-04-11 1987-10-21 Jeol Ltd Ｘ線マイクロアナライザ−等に使用する光学顕微鏡の自動焦点合わせ装置
JPS6323114A (ja) * 1986-03-25 1988-01-30 Asahi Optical Co Ltd 焦点検出用補助投光装置
JPS63212911A (ja) * 1987-03-02 1988-09-05 Hitachi Electronics Eng Co Ltd オ−トフオ−カス方式
JPS63239412A (ja) * 1987-03-27 1988-10-05 Hitachi Electronics Eng Co Ltd オ−トフオ−カス方式
JP2007155379A (ja) * 2005-12-01 2007-06-21 Tokyo Univ Of Agriculture & Technology 三次元形状計測装置および三次元形状計測方法
JP2010026212A (ja) * 2008-07-18 2010-02-04 Mitsutoyo Corp オートフォーカス装置
US8314849B2 (en) 2008-03-11 2012-11-20 Nikon Corporation Shape measuring device
US10728519B2 (en) 2004-06-17 2020-07-28 Align Technology, Inc. Method and apparatus for colour imaging a three-dimensional structure
US10952827B2 (en) 2014-08-15 2021-03-23 Align Technology, Inc. Calibration of an intraoral scanner

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6396039B1 (en) * 1999-03-11 2002-05-28 Corning Incorporated Focusing filament for autofocus system
JP5434379B2 (ja) * 2009-08-28 2014-03-05 株式会社ニコン スケール体、位置検出装置、ステージ装置、及び露光装置

Cited By (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57207852A (en) * 1981-05-15 1982-12-20 Siemens Ag Method of detecting three-dimensional object
JPS5811803A (ja) * 1981-07-15 1983-01-22 Hitachi Ltd 膜厚測定方法およびその装置
JPS5875005A (ja) * 1981-10-30 1983-05-06 Hitachi Ltd 板厚測定方法および装置
JPS6118913A (ja) * 1984-07-06 1986-01-27 Kowa Co 自動焦点調整装置
JPS6199113A (ja) * 1984-10-22 1986-05-17 Toho Denshi Kogyo Kk 顕微鏡のピント合わせ方法
JPS61138222A (ja) * 1984-12-11 1986-06-25 Minolta Camera Co Ltd Ｔ．ｔ．ｌ焦点検出装置を有するカメラの照明装置
JPS61235808A (ja) * 1985-04-12 1986-10-21 Hitachi Ltd 自動焦点合せ方法及び装置
JPS622118A (ja) * 1985-06-17 1987-01-08 ヴイユウ　エンジニアリング　インコ−ポレイテツド Ｚ軸方向位置測定方法及び装置
JPS627010U (enrdf_load_stackoverflow) * 1985-06-28 1987-01-16
JPS628437A (ja) * 1985-07-04 1987-01-16 Jeol Ltd 粒子線マイクロアナライザ−
JPS6323114A (ja) * 1986-03-25 1988-01-30 Asahi Optical Co Ltd 焦点検出用補助投光装置
JPS62241246A (ja) * 1986-04-11 1987-10-21 Jeol Ltd Ｘ線マイクロアナライザ−等に使用する光学顕微鏡の自動焦点合わせ装置
JPS63212911A (ja) * 1987-03-02 1988-09-05 Hitachi Electronics Eng Co Ltd オ−トフオ−カス方式
JPS63239412A (ja) * 1987-03-27 1988-10-05 Hitachi Electronics Eng Co Ltd オ−トフオ−カス方式
US10728519B2 (en) 2004-06-17 2020-07-28 Align Technology, Inc. Method and apparatus for colour imaging a three-dimensional structure
US10750152B2 (en) 2004-06-17 2020-08-18 Align Technology, Inc. Method and apparatus for structure imaging a three-dimensional structure
US10750151B2 (en) 2004-06-17 2020-08-18 Align Technology, Inc. Method and apparatus for colour imaging a three-dimensional structure
US10764557B2 (en) 2004-06-17 2020-09-01 Align Technology, Inc. Method and apparatus for imaging a three-dimensional structure
US10812773B2 (en) 2004-06-17 2020-10-20 Align Technology, Inc. Method and apparatus for colour imaging a three-dimensional structure
US10924720B2 (en) 2004-06-17 2021-02-16 Align Technology, Inc. Systems and methods for determining surface topology and associated color of an intraoral structure
US10944953B2 (en) 2004-06-17 2021-03-09 Align Technology, Inc. Method and apparatus for colour imaging a three-dimensional structure
JP2007155379A (ja) * 2005-12-01 2007-06-21 Tokyo Univ Of Agriculture & Technology 三次元形状計測装置および三次元形状計測方法
US8314849B2 (en) 2008-03-11 2012-11-20 Nikon Corporation Shape measuring device
JP2010026212A (ja) * 2008-07-18 2010-02-04 Mitsutoyo Corp オートフォーカス装置
US10952827B2 (en) 2014-08-15 2021-03-23 Align Technology, Inc. Calibration of an intraoral scanner

Also Published As

Publication number Publication date
JPS6219685B2 (enrdf_load_stackoverflow) 1987-04-30

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