JPS62183573A - 超電導集積回路 - Google Patents

超電導集積回路

Info

Publication number
JPS62183573A
JPS62183573A JP61024966A JP2496686A JPS62183573A JP S62183573 A JPS62183573 A JP S62183573A JP 61024966 A JP61024966 A JP 61024966A JP 2496686 A JP2496686 A JP 2496686A JP S62183573 A JPS62183573 A JP S62183573A
Authority
JP
Japan
Prior art keywords
superconducting
terminal electrode
electrode
integrated circuit
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61024966A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0334236B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Mikio Hirano
幹夫 平野
Hideaki Nakane
中根 英章
Yoshinobu Taruya
良信 樽谷
Ushio Kawabe
川辺 潮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP61024966A priority Critical patent/JPS62183573A/ja
Publication of JPS62183573A publication Critical patent/JPS62183573A/ja
Publication of JPH0334236B2 publication Critical patent/JPH0334236B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP61024966A 1986-02-08 1986-02-08 超電導集積回路 Granted JPS62183573A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61024966A JPS62183573A (ja) 1986-02-08 1986-02-08 超電導集積回路

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61024966A JPS62183573A (ja) 1986-02-08 1986-02-08 超電導集積回路

Publications (2)

Publication Number Publication Date
JPS62183573A true JPS62183573A (ja) 1987-08-11
JPH0334236B2 JPH0334236B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-05-21

Family

ID=12152711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61024966A Granted JPS62183573A (ja) 1986-02-08 1986-02-08 超電導集積回路

Country Status (1)

Country Link
JP (1) JPS62183573A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS616882A (ja) * 1984-06-21 1986-01-13 Agency Of Ind Science & Technol 超電導集積回路の端子電極とその製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS616882A (ja) * 1984-06-21 1986-01-13 Agency Of Ind Science & Technol 超電導集積回路の端子電極とその製造方法

Also Published As

Publication number Publication date
JPH0334236B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-05-21

Similar Documents

Publication Publication Date Title
US4660061A (en) Intermediate normal metal layers in superconducting circuitry
JPS62183573A (ja) 超電導集積回路
EP1563538A1 (en) Device comprising circuit elements connected by bonding bump structure
JPH0158875B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS59229850A (ja) 半導体装置
JPS6260836B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS59107586A (ja) 超伝導フリツプチツプボンデイング方法
JPH0114715B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP3213722B2 (ja) 超伝導集積回路のフリップチップ接続方法
JPH09252026A (ja) 超伝導装置
JP2641451B2 (ja) 酸化物超電導集積回路
JP2698364B2 (ja) 超伝導コンタクトおよびその製造方法
JPS58157181A (ja) 超電導回路用コンタクト
JPS6068681A (ja) 超伝導トランジスタ
JPS5897881A (ja) 超電導薄膜機能素子の接続端子用突起電極
JPS5897880A (ja) 超電導薄膜機能素子の接続端子用突起電極
JPS589382A (ja) ジヨセフソン素子
JPH07183305A (ja) バンプ電極形成方法
JPH08227743A (ja) 酸化物超電導体用金属電極
JPH05251769A (ja) 超電導電流路の接続構造
JPH04127531A (ja) 半導体装置及びその製造方法
JPH07302932A (ja) 超伝導素子のボンディング用パッドおよびその製造方法
JPH0794631A (ja) セラミック回路基板
JPS58207686A (ja) 低温デバイスの超伝導接続方法
JPS60160674A (ja) 集積回路装置

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term