JPS621793B2 - - Google Patents

Info

Publication number
JPS621793B2
JPS621793B2 JP16440479A JP16440479A JPS621793B2 JP S621793 B2 JPS621793 B2 JP S621793B2 JP 16440479 A JP16440479 A JP 16440479A JP 16440479 A JP16440479 A JP 16440479A JP S621793 B2 JPS621793 B2 JP S621793B2
Authority
JP
Japan
Prior art keywords
coating
coated
photosensitive resin
semiconductor substrate
solvent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16440479A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5687471A (en
Inventor
Mototsugu Ogura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP16440479A priority Critical patent/JPS5687471A/ja
Publication of JPS5687471A publication Critical patent/JPS5687471A/ja
Publication of JPS621793B2 publication Critical patent/JPS621793B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP16440479A 1979-12-17 1979-12-17 Coating process Granted JPS5687471A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16440479A JPS5687471A (en) 1979-12-17 1979-12-17 Coating process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16440479A JPS5687471A (en) 1979-12-17 1979-12-17 Coating process

Publications (2)

Publication Number Publication Date
JPS5687471A JPS5687471A (en) 1981-07-16
JPS621793B2 true JPS621793B2 (enrdf_load_stackoverflow) 1987-01-16

Family

ID=15792484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16440479A Granted JPS5687471A (en) 1979-12-17 1979-12-17 Coating process

Country Status (1)

Country Link
JP (1) JPS5687471A (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5950525A (ja) * 1982-09-16 1984-03-23 M Setetsuku Kk フオトレジストの塗布装置
JPS60149131A (ja) * 1984-01-17 1985-08-06 Fujitsu Ltd レジスト塗布方法
JPS60193339A (ja) * 1984-03-14 1985-10-01 Fujitsu Ltd レジスト膜塗布方法
JPS6156414A (ja) * 1984-08-28 1986-03-22 Fujitsu Ltd スピンコ−ト方法
JPH0236276Y2 (enrdf_load_stackoverflow) * 1985-01-10 1990-10-03
JPS6379635U (enrdf_load_stackoverflow) * 1986-11-11 1988-05-26
JPS63136528A (ja) * 1986-11-27 1988-06-08 Mitsubishi Electric Corp 処理液塗布装置
JP2004160336A (ja) * 2002-11-12 2004-06-10 Seiko Epson Corp 膜形成装置及び膜形成方法、有機ｅｌ装置の製造方法、並びに液体吐出装置

Also Published As

Publication number Publication date
JPS5687471A (en) 1981-07-16

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