JPS62170575U - - Google Patents
Info
- Publication number
- JPS62170575U JPS62170575U JP5943486U JP5943486U JPS62170575U JP S62170575 U JPS62170575 U JP S62170575U JP 5943486 U JP5943486 U JP 5943486U JP 5943486 U JP5943486 U JP 5943486U JP S62170575 U JPS62170575 U JP S62170575U
- Authority
- JP
- Japan
- Prior art keywords
- test
- semiconductor device
- semiconductor
- under test
- device under
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000005259 measurement Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第1図は本考案の一実施例の要部を示す構成説
明図、第2図は第1図の装置におけるDUTのハ
ンドリングの具体例を示す構成説明図である。
1…テスト対象半導体装置(DUT)、2,3
…テストヘツド、4…レール、5,6…測定ピン
。
FIG. 1 is an explanatory diagram showing a main part of an embodiment of the present invention, and FIG. 2 is an explanatory diagram showing a specific example of handling of a DUT in the apparatus shown in FIG. 1... Semiconductor device under test (DUT), 2, 3
...Test head, 4...Rail, 5, 6...Measurement pin.
Claims (1)
テストする半導体テスト装置において、テスト対
象半導体装置と測定モジユールとの間で信号の授
受を行うために選択的にテスト対象半導体装置の
ピンに接触するように変位駆動される複数の接続
ピンを有する2個のテストヘツドがテスト対象半
導体装置を両面から挾むように対向配置されたこ
とを特徴とする半導体テスト装置。 In semiconductor test equipment that tests a semiconductor device packaged in a predetermined case, a device that is displaced so as to selectively contact pins of the semiconductor device under test in order to exchange signals between the semiconductor device under test and the measurement module. A semiconductor test device characterized in that two test heads each having a plurality of driven connection pins are arranged facing each other so as to sandwich a semiconductor device under test from both sides.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5943486U JPS62170575U (en) | 1986-04-19 | 1986-04-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5943486U JPS62170575U (en) | 1986-04-19 | 1986-04-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62170575U true JPS62170575U (en) | 1987-10-29 |
Family
ID=30890925
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5943486U Pending JPS62170575U (en) | 1986-04-19 | 1986-04-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62170575U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0210488U (en) * | 1988-06-23 | 1990-01-23 |
-
1986
- 1986-04-19 JP JP5943486U patent/JPS62170575U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0210488U (en) * | 1988-06-23 | 1990-01-23 |
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