JPS59192839U - Wafer measurement equipment - Google Patents
Wafer measurement equipmentInfo
- Publication number
- JPS59192839U JPS59192839U JP8844083U JP8844083U JPS59192839U JP S59192839 U JPS59192839 U JP S59192839U JP 8844083 U JP8844083 U JP 8844083U JP 8844083 U JP8844083 U JP 8844083U JP S59192839 U JPS59192839 U JP S59192839U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- stage
- holding
- defective
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は被測定ウェハと良品デバイスが保持されている
ステージを示す平面図、第２図はブロックダイヤグラム
、第３図はフローチャートである。
１・・・ステージ、２・・・ウェハ、２ａ、 ２ｂ、
２Ｃ・・・区画、３・・・良品のデバイス。FIG. 1 is a plan view showing a stage on which a wafer to be measured and non-defective devices are held, FIG. 2 is a block diagram, and FIG. 3 is a flow chart. 1... Stage, 2... Wafer, 2a, 2b,
2C...Division, 3...Good device.
Claims (1)
的に測定する装置において、被測定ウェハが保持される
ステージと、良品デバイスが保持されるステージと、良
品デバイスおよび被測定ウェハに対して相対的に接触、
離間可能に備えられたウエハプローバと、このウエハプ
ローバと電気的に接続され、被測定ウェハの特性を測定
すると共に、このウェハが良品であるか否かを判断する
テスタと、このテスタが少なくとも２回連続して不良品
を検知した際には、前記ウエハプローバは良品デバイス
に接触し、良品デバイスをも不良品であると判断した場
合には、少なくとも測定装置の一部が故障していること
を表示する手段とが具備されていることを特徴とするウ
ェハの測定装置。 ２ 被測定ウェハが保持されるステージと良品デバイス
が保持されるステージが、一体形成されている実用新案
登録請求の範囲第１項記載のウェハ測定装置。[Claims for Utility Model Registration] 1. In an apparatus that sequentially and continuously measures each section of a wafer to be measured divided into a plurality of sections, a stage for holding a wafer to be measured, a stage for holding a non-defective device, and a stage for holding a non-defective device. contact relative to the device and the wafer under test;
A wafer prober that is separably provided; a tester that is electrically connected to the wafer prober and measures the characteristics of the wafer to be measured and determines whether the wafer is a good product; When a defective product is detected twice in a row, the wafer prober comes into contact with a good device, and if the good device is also judged to be defective, it means that at least a part of the measuring device is malfunctioning. A wafer measuring device characterized in that it is equipped with means for displaying. 2. The wafer measuring apparatus according to claim 1, wherein the stage for holding the wafer to be measured and the stage for holding the non-defective device are integrally formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8844083U JPS59192839U (en) | 1983-06-08 | 1983-06-08 | Wafer measurement equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8844083U JPS59192839U (en) | 1983-06-08 | 1983-06-08 | Wafer measurement equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59192839U true JPS59192839U (en) | 1984-12-21 |
Family
ID=30218350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8844083U Pending JPS59192839U (en) | 1983-06-08 | 1983-06-08 | Wafer measurement equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59192839U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01125839A (en) * | 1987-11-10 | 1989-05-18 | Tokyo Electron Ltd | Inspection |
-
1983
- 1983-06-08 JP JP8844083U patent/JPS59192839U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01125839A (en) * | 1987-11-10 | 1989-05-18 | Tokyo Electron Ltd | Inspection |
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