JPS61127469U - - Google Patents
Info
- Publication number
- JPS61127469U JPS61127469U JP1001685U JP1001685U JPS61127469U JP S61127469 U JPS61127469 U JP S61127469U JP 1001685 U JP1001685 U JP 1001685U JP 1001685 U JP1001685 U JP 1001685U JP S61127469 U JPS61127469 U JP S61127469U
- Authority
- JP
- Japan
- Prior art keywords
- test stations
- semiconductor testing
- testing device
- memory
- input
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012360 testing method Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案に係る半導体試験装置の全体ブ
ロツク図、第２図は従来の半導体試験装置の全体
構成ブロツク図、第３図は他の実施例を示す半導
体試験装置のブロツク図である。
１１……テスタ本体、１２……ＣＰＵ、１３…
…メモリ、１４，１５……テストステーシヨン、
１６，１７……データバツフア、１８，１９……
入出力装置、２０，２１……被測定試料。
FIG. 1 is an overall block diagram of a semiconductor testing device according to the present invention, FIG. 2 is a block diagram of the overall configuration of a conventional semiconductor testing device, and FIG. 3 is a block diagram of a semiconductor testing device showing another embodiment. 11...Tester body, 12...CPU, 13...
...Memory, 14,15...Test station,
16,17...data buffer, 18,19...
Input/output device, 20, 21... Sample to be measured.
Claims (1)
において、複数のテストステーシヨンを設け、こ
れらの各テストステーシヨンに各専用のデータバ
ツフアと入出力装置とを付属させるようにしたこ
とを特徴とする半導体試験装置。 1. A semiconductor testing device including a central processing unit and a memory, characterized in that a plurality of test stations are provided, and each of these test stations is attached with its own dedicated data buffer and input/output device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1001685U JPS61127469U (en) | 1985-01-29 | 1985-01-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1001685U JPS61127469U (en) | 1985-01-29 | 1985-01-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61127469U true JPS61127469U (en) | 1986-08-09 |
Family
ID=30490809
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1001685U Pending JPS61127469U (en) | 1985-01-29 | 1985-01-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61127469U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01291440A (en) * | 1988-05-18 | 1989-11-24 | Tokyo Electron Ltd | Wafer prober |
-
1985
- 1985-01-29 JP JP1001685U patent/JPS61127469U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01291440A (en) * | 1988-05-18 | 1989-11-24 | Tokyo Electron Ltd | Wafer prober |
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